JPS61129881U - - Google Patents

Info

Publication number
JPS61129881U
JPS61129881U JP953585U JP953585U JPS61129881U JP S61129881 U JPS61129881 U JP S61129881U JP 953585 U JP953585 U JP 953585U JP 953585 U JP953585 U JP 953585U JP S61129881 U JPS61129881 U JP S61129881U
Authority
JP
Japan
Prior art keywords
wafers
chamber
cassette
stocker
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP953585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP953585U priority Critical patent/JPS61129881U/ja
Priority to US06/819,253 priority patent/US4759681A/en
Publication of JPS61129881U publication Critical patent/JPS61129881U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP953585U 1985-01-22 1985-01-26 Pending JPS61129881U (enExample)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP953585U JPS61129881U (enExample) 1985-01-26 1985-01-26
US06/819,253 US4759681A (en) 1985-01-22 1986-01-16 End station for an ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP953585U JPS61129881U (enExample) 1985-01-26 1985-01-26

Publications (1)

Publication Number Publication Date
JPS61129881U true JPS61129881U (enExample) 1986-08-14

Family

ID=30489847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP953585U Pending JPS61129881U (enExample) 1985-01-22 1985-01-26

Country Status (1)

Country Link
JP (1) JPS61129881U (enExample)

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