JPS61129847A - 半導体装置の金属配線パタ−ン形成方法 - Google Patents

半導体装置の金属配線パタ−ン形成方法

Info

Publication number
JPS61129847A
JPS61129847A JP25232184A JP25232184A JPS61129847A JP S61129847 A JPS61129847 A JP S61129847A JP 25232184 A JP25232184 A JP 25232184A JP 25232184 A JP25232184 A JP 25232184A JP S61129847 A JPS61129847 A JP S61129847A
Authority
JP
Japan
Prior art keywords
wiring pattern
wiring
etching
semiconductor device
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25232184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251252B2 (enrdf_load_stackoverflow
Inventor
Masanori Sato
正憲 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP25232184A priority Critical patent/JPS61129847A/ja
Publication of JPS61129847A publication Critical patent/JPS61129847A/ja
Publication of JPH0251252B2 publication Critical patent/JPH0251252B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP25232184A 1984-11-29 1984-11-29 半導体装置の金属配線パタ−ン形成方法 Granted JPS61129847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25232184A JPS61129847A (ja) 1984-11-29 1984-11-29 半導体装置の金属配線パタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25232184A JPS61129847A (ja) 1984-11-29 1984-11-29 半導体装置の金属配線パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS61129847A true JPS61129847A (ja) 1986-06-17
JPH0251252B2 JPH0251252B2 (enrdf_load_stackoverflow) 1990-11-06

Family

ID=17235628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25232184A Granted JPS61129847A (ja) 1984-11-29 1984-11-29 半導体装置の金属配線パタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS61129847A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7943436B2 (en) 2002-07-29 2011-05-17 Synopsys, Inc. Integrated circuit devices and methods and apparatuses for designing integrated circuit devices

Also Published As

Publication number Publication date
JPH0251252B2 (enrdf_load_stackoverflow) 1990-11-06

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