JPS61127699A - ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法 - Google Patents

ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法

Info

Publication number
JPS61127699A
JPS61127699A JP24909884A JP24909884A JPS61127699A JP S61127699 A JPS61127699 A JP S61127699A JP 24909884 A JP24909884 A JP 24909884A JP 24909884 A JP24909884 A JP 24909884A JP S61127699 A JPS61127699 A JP S61127699A
Authority
JP
Japan
Prior art keywords
mixed crystal
type
crystal layer
substrate
gallium arsenide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24909884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058155B2 (cg-RX-API-DMAC7.html
Inventor
Koji Kobashi
小橋　康二
Toshio Ishiwatari
石渡　俊男
Hisanori Fujita
尚徳 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Monsanto Chemical Co
Mitsubishi Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Monsanto Chemical Co, Mitsubishi Chemical Industries Ltd filed Critical Mitsubishi Monsanto Chemical Co
Priority to JP24909884A priority Critical patent/JPS61127699A/ja
Publication of JPS61127699A publication Critical patent/JPS61127699A/ja
Publication of JPH058155B2 publication Critical patent/JPH058155B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP24909884A 1984-11-26 1984-11-26 ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法 Granted JPS61127699A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24909884A JPS61127699A (ja) 1984-11-26 1984-11-26 ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24909884A JPS61127699A (ja) 1984-11-26 1984-11-26 ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法

Publications (2)

Publication Number Publication Date
JPS61127699A true JPS61127699A (ja) 1986-06-14
JPH058155B2 JPH058155B2 (cg-RX-API-DMAC7.html) 1993-02-01

Family

ID=17187937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24909884A Granted JPS61127699A (ja) 1984-11-26 1984-11-26 ひ化ガリウム・アルミニウム混晶エピタキシヤルウエハ及びその製造方法

Country Status (1)

Country Link
JP (1) JPS61127699A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106171U (ja) * 1991-02-28 1992-09-11 リヨービ株式会社 電動工具

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5670676A (en) * 1979-11-14 1981-06-12 Sharp Corp Luminous diode
JPS5816535A (ja) * 1981-07-23 1983-01-31 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPS58210682A (ja) * 1982-05-31 1983-12-07 Sharp Corp 半導体発光素子
JPS5969977A (ja) * 1982-10-15 1984-04-20 Matsushita Electric Ind Co Ltd 半導体発光装置
JPS6186500A (ja) * 1984-10-05 1986-05-01 Showa Denko Kk ＧａＡｌＡｓ発光素子の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5670676A (en) * 1979-11-14 1981-06-12 Sharp Corp Luminous diode
JPS5816535A (ja) * 1981-07-23 1983-01-31 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPS58210682A (ja) * 1982-05-31 1983-12-07 Sharp Corp 半導体発光素子
JPS5969977A (ja) * 1982-10-15 1984-04-20 Matsushita Electric Ind Co Ltd 半導体発光装置
JPS6186500A (ja) * 1984-10-05 1986-05-01 Showa Denko Kk ＧａＡｌＡｓ発光素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106171U (ja) * 1991-02-28 1992-09-11 リヨービ株式会社 電動工具

Also Published As

Publication number Publication date
JPH058155B2 (cg-RX-API-DMAC7.html) 1993-02-01

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