JPS6112674Y2 - - Google Patents
Info
- Publication number
- JPS6112674Y2 JPS6112674Y2 JP12545079U JP12545079U JPS6112674Y2 JP S6112674 Y2 JPS6112674 Y2 JP S6112674Y2 JP 12545079 U JP12545079 U JP 12545079U JP 12545079 U JP12545079 U JP 12545079U JP S6112674 Y2 JPS6112674 Y2 JP S6112674Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- furnace core
- core tube
- susceptor
- cylindrical part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 31
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12545079U JPS6112674Y2 (enrdf_load_stackoverflow) | 1979-09-11 | 1979-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12545079U JPS6112674Y2 (enrdf_load_stackoverflow) | 1979-09-11 | 1979-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5643162U JPS5643162U (enrdf_load_stackoverflow) | 1981-04-20 |
| JPS6112674Y2 true JPS6112674Y2 (enrdf_load_stackoverflow) | 1986-04-19 |
Family
ID=29357341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12545079U Expired JPS6112674Y2 (enrdf_load_stackoverflow) | 1979-09-11 | 1979-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6112674Y2 (enrdf_load_stackoverflow) |
-
1979
- 1979-09-11 JP JP12545079U patent/JPS6112674Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5643162U (enrdf_load_stackoverflow) | 1981-04-20 |
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