JPS61125768A - Method of cutting off fragile material - Google Patents

Abstract

PURPOSE:To supply sufficiently uniform working liquid, improve cutting efficiency and working accuracy and reduce the wear of a wire by supply the working liquid including grains from a slit nozzel having a slit-like outflow hole along a member to be cut off. CONSTITUTION:Working liquid is flowed down from a slit nozzle 14 like a water screen to cut off a member 3 by the use of the working liquid supplying slit nozzle 14 having a slit-like outflow hole 15 longitudinally of the member 3 to be cut off. Thus, the working liquid can be uniformly sufficiently supplied to a sliding contact portion between said member 3 and a wire 2, said member, wire slide portion and wire portion so that the cutting accuracy and cutting capacity of a wire saw can be substantially improved and the wear of wire is effectively reduced to eliminate almost the disconnection accident of wire.

Description

DETAILED DESCRIPTION OF THE INVENTION Industrial Application This invention is a method for processing so-called brittle materials such as semiconductor materials, magnetic materials, and ceramics using a machining fluid containing wires and abrasive grains or a cutting fluid containing acid (hereinafter referred to as machining fluid). ) In particular, it relates to a method of cutting (including notching).

Prior Art and Its Problems One method for cutting brittle materials such as semiconductor materials is a wire saw, which cuts by supplying a machining fluid containing abrasive grains while bringing the wire into contact with the member to be cut Ktl. To explain the cutting method, as shown in FIG. 6, wires (2) are stretched in parallel at predetermined intervals between a plurality of grooved loaves (1), and the wire portions are cut into pieces (3). ) is pressed while the wire runs, and at the same time, machining liquid containing abrasive grains is supplied to the part to be cut from the machining liquid supply porous nozzle A/(41) provided above the part to be cut (3), and the part to be cut is cut. (5) is a platform for pushing up the workpiece to be cut.The above-mentioned machining fluid supply porous nozzle (4J is for pushing up the workpiece (3)K
A large number of holes are drilled at regular intervals along the length of the cutter, and the machining fluid is arranged so that it falls in a line from the holes and is supplied onto the workpiece to be cut.

However, in the cutting method using such a machining fluid supply porous nozzle, the cutting wire (2) and the workpiece to be cut (
3) Sliding contact part KIIIiI- and sufficient machining fluid is not supplied, leading to a decrease in machining accuracy (surface roughness, flaws) and cutting efficiency of the workpiece to be cut, as well as premature wear of the wire, resulting in wire breakage accidents. etc., sometimes occurred.

Purpose of the Invention This invention was made to solve the above-mentioned conventional problems, and it is possible to ensure that the machining fluid is always uniformly and sufficiently supplied.
The purpose of this invention is to develop a method for cutting brittle materials that can improve cutting efficiency and processing accuracy and significantly reduce wire wear.

Structure of the Invention The method for cutting a brittle material according to the present invention includes cutting a wire into a member to be cut KJ'1llll! The method of cutting by supplying machining liquid while cutting the workpiece is characterized in that a slit nozzle having a slit-shaped outflow hole along the cut member is used, and a machining liquid containing abrasive grains is supplied through the slit nozzle M. It is something.

The method of this invention will be explained below based on the drawings.

Fig. 1 shows an example of a rounding device for carrying out the method of the present invention. Using a machining fluid supply slit nozzle 1vaa having a slit-like outflow hole in the longitudinal direction of the member, cutting is performed by causing the machining fluid to flow down through the slit nozzle in the form of a water curtain.

As another method, as shown in Fig. 2, a hopper-shaped slit nozzle with a lower opening formed in a slit shape along the cut member (3) K is used directly below the conventional machining fluid supply porous nozzle Iv (41). A hopper-shaped slit nozzle /I/(
(to), and a method can be adopted in which the machining fluid is supplied by flowing down in a water curtain shape to the sliding contact portion between the wire (2) and the member to be cut (3).

In both of the methods shown in FIGS. 1 and 2 above, cutting is performed by supplying Ki[l' machining fluid only to the sliding contact portion between the workpiece and the wire. 1st
Attach the O slit nozzle A/ (14-1) of the same structure to both sides of the slit nozzle number a shown in the figure via a branch pipe α,
Left and right slit nozzles u (1
From 4-1), it is also possible to adopt a method of supplying the machining fluid to each wire (2) by flowing it down in the form of a water curtain and cutting.

Furthermore, as shown in FIG. 4, the center nozzle is the same slit nozzle tv (141) as described above, and the left and right nozzles are the same machining fluid supply porous nozzle (4) or slit nozzle p as before. A hollow/(--shaped slit nozzle tv (16-1) is provided at the bottom, and the machining liquid is supplied by flowing down in a water curtain shape to the sliding contact area between the member to be cut (3) and the wire (2) and the wire area. How to cut it.

In addition, in place of the hopper-shaped slit nozzle /I/ shown in FIG. 4, FIG.
(16-2), in which case the wire (2) is passed through the slit nozzle/L' (16-2) and cutting is performed with the wire immersed in the machining liquid.

Note that when using this slit nozzle, the workpiece to be cut (
3) and the wire (2), the machining fluid is also supplied to the sliding contact portion, so there is no particular problem even if the central slit nozzle /vQ4 is omitted. The slit nozzle/' (16-2) has a two-part structure as shown in the figure in order to pass the wire (2) through it. Tighten and integrate.In the case of unidirectional traveling cutting, the slit nozzle may be installed only on the wire entry side with respect to the member to be cut.

Effects of the Invention The method of the invention uses the slit nozzle μ as described above to cut while supplying machining liquid in the form of a water curtain.
In the case of FIG. 1, the slit nozzle wa41 supplies cutting fluid to the l'lFM' portion of the member to be cut (3) and the wire (2) in the form of a water curtain while cutting. In addition, in the case of Fig. 2, the machining fluid flowing out from the porous nozzle /%/(41) is received by the hopper-shaped slit nozzle #at9, and the pressure unevenness of the machining fluid increases, making it easy for the machining fluid to water. A curtain is formed, and the water curtain is supplied to the sliding contact portion between the member to be cut (3) and the wire (2), and cutting is performed.

In the case of Fig. 3, from the central slit nozzle A/(141) and the slit nozzles (14-1) on both sides of the claw μ,
Crab cutting is performed in which machining liquid is supplied in a water curtain to the sliding contact portion between the member to be cut (3) and the wire (2) and the wire portion. In the case of Fig. 4, the machining fluid flows from the central slit nozzle tvllllJ to the workpiece (3) and the wire (
2) is supplied in the form of a water curtain to the sliding contact area, and the machining liquid flowing out from the porous nozzles (4) on both sides is brought close to the wire portion through the hopper-shaped slit nozzle (16-1). Since the water curtain button is supplied using natural falling, the adhesion of abrasive grains to the wire increases, resulting in good cutting. Fifth
In the case of the figure, the machining fluid flows from the central slit nozzle μα in the form of a water curtain VC1'! lW! At the same time, the machining liquid is supplied to the wire section in the inverted T-shaped slit nozzles (16-2) on both sides, so that good cutting can be performed in the same manner as described above.

Therefore, according to the method of the present invention, machining liquid can be uniformly and sufficiently supplied to the sliding contact portion between the workpiece to be cut and the wire, and the sliding contact portion between the workpiece to be cut and the wire and the wire portion, thereby improving the cutting accuracy of the wire saw. In addition, the cutting efficiency can be greatly improved, and the effect of reducing wire wear is also large, and wire breakage accidents are almost eliminated.

! ! EXAMPLE The method of this invention was applied to a wire saw to cut a φ5"S1 single crystal under the following conditions. The results are shown below using the same wire saw with machining fluid # supplied using a conventional multi-hole nozzle as shown in FIG. Table 1 shows a comparison with the case of cutting.

Cutting conditions Wire speed: average 100 s/i, for reciprocating method Working liquid: mixture of GCloo and Futudeoy Number of wafers cut: 150 wafers] As is clear from Table 1, the method of this invention, the wire and Since a sufficient amount of machining fluid is evenly supplied to the sliding contact area of the workpiece, cutting accuracy, cutting efficiency, and wire wear amount have all been greatly improved.

[Brief explanation of the drawing]

Figures 1 to 5 are schematic diagrams showing an example of an apparatus for confirming the method of this invention, and Figure 6 is a diagram showing a conventional cutting method.
I can use ra. 1... Groove loaf, 2... Wire, 3... Member to be cut, 5... Pushing stand, 14.14-1.16
．． 16-1.16-2...Slit nozzle, 15.
...Outflow hole.

Claims (1)

[Claims] In a method of cutting a wire by supplying machining fluid while bringing the workpiece into sliding contact with the wire, a slit nozzle having a slit-shaped outflow hole along the workpiece is used, and the machining fluid is supplied from the slit nozzle. Characteristic cutting method for brittle materials.