JPS6112241B2 - - Google Patents
Info
- Publication number
- JPS6112241B2 JPS6112241B2 JP55029892A JP2989280A JPS6112241B2 JP S6112241 B2 JPS6112241 B2 JP S6112241B2 JP 55029892 A JP55029892 A JP 55029892A JP 2989280 A JP2989280 A JP 2989280A JP S6112241 B2 JPS6112241 B2 JP S6112241B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- refractive index
- optical waveguide
- substance
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 18
- 238000009792 diffusion process Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2989280A JPS56126810A (en) | 1980-03-10 | 1980-03-10 | Preparation for light waveguide line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2989280A JPS56126810A (en) | 1980-03-10 | 1980-03-10 | Preparation for light waveguide line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56126810A JPS56126810A (en) | 1981-10-05 |
| JPS6112241B2 true JPS6112241B2 (enrdf_load_stackoverflow) | 1986-04-07 |
Family
ID=12288614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2989280A Granted JPS56126810A (en) | 1980-03-10 | 1980-03-10 | Preparation for light waveguide line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56126810A (enrdf_load_stackoverflow) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5881229U (ja) * | 1981-11-30 | 1983-06-01 | 凸版印刷株式会社 | 溝付ボ−ド |
| JPS5897006A (ja) * | 1981-12-04 | 1983-06-09 | Nec Corp | 光導波路の製造方法 |
| JPH0723927B2 (ja) * | 1983-08-09 | 1995-03-15 | 富士通株式会社 | 光導波路の製造方法 |
| JPH0697287B2 (ja) * | 1984-12-06 | 1994-11-30 | 日本電気株式会社 | 光制御回路の製造方法 |
| JPS62258419A (ja) * | 1986-05-02 | 1987-11-10 | Nec Corp | 光制御デバイス |
| JPH07109444B2 (ja) * | 1986-06-18 | 1995-11-22 | 日本電気株式会社 | 導波型平面光回路の製造方法 |
| JPS6370827A (ja) * | 1986-09-12 | 1988-03-31 | Nec Corp | 光制御デバイスの製造方法 |
| JPH01134402A (ja) * | 1987-11-20 | 1989-05-26 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路の製造方法 |
| JPH01178917A (ja) * | 1987-12-29 | 1989-07-17 | Nec Corp | 光制御回路およびその製造方法 |
-
1980
- 1980-03-10 JP JP2989280A patent/JPS56126810A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56126810A (en) | 1981-10-05 |
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