JPS61117243U - - Google Patents

Info

Publication number
JPS61117243U
JPS61117243U JP71585U JP71585U JPS61117243U JP S61117243 U JPS61117243 U JP S61117243U JP 71585 U JP71585 U JP 71585U JP 71585 U JP71585 U JP 71585U JP S61117243 U JPS61117243 U JP S61117243U
Authority
JP
Japan
Prior art keywords
diffusion source
vane plate
semiconductor substrate
rotary table
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP71585U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP71585U priority Critical patent/JPS61117243U/ja
Publication of JPS61117243U publication Critical patent/JPS61117243U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示し、ａは平面図
、ｂは側断面図、第２図は従来の塗布装置を用い
た場合の半導体基板の断面図、第３図はその下面
図である。 １：回転台、２：回転軸、３：羽根板、７：整
流板、８：気流、１１：半導体基板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 下側に垂直回転軸を備えた回転台上に載置され
    た半導体基板の上方より液状拡散ソースを滴下し
    、回転台の回転によつて半導体基板の上面に拡散
    ソースを広げるものにおいて、回転台回転軸に固
    定された羽根板と、羽根板と回転台の中間に羽根
    板の基部の上から回転台の外周に向かう整流板と
    を有することを特徴とする拡散ソース塗布装置。
JP71585U 1985-01-08 1985-01-08 Pending JPS61117243U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP71585U JPS61117243U (ja) 1985-01-08 1985-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP71585U JPS61117243U (ja) 1985-01-08 1985-01-08

Publications (1)

Publication Number Publication Date
JPS61117243U true JPS61117243U (ja) 1986-07-24

Family

ID=30472806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP71585U Pending JPS61117243U (ja) 1985-01-08 1985-01-08

Country Status (1)

Country Link
JP (1) JPS61117243U (ja)

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