JPS61116063U - - Google Patents

Info

Publication number
JPS61116063U
JPS61116063U JP20209984U JP20209984U JPS61116063U JP S61116063 U JPS61116063 U JP S61116063U JP 20209984 U JP20209984 U JP 20209984U JP 20209984 U JP20209984 U JP 20209984U JP S61116063 U JPS61116063 U JP S61116063U
Authority
JP
Japan
Prior art keywords
sample
electron beam
objective lens
electrode
emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20209984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236209Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984202099U priority Critical patent/JPH0236209Y2/ja
Publication of JPS61116063U publication Critical patent/JPS61116063U/ja
Application granted granted Critical
Publication of JPH0236209Y2 publication Critical patent/JPH0236209Y2/ja
Expired legal-status Critical Current

Links

JP1984202099U 1984-12-28 1984-12-28 Expired JPH0236209Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984202099U JPH0236209Y2 (enExample) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984202099U JPH0236209Y2 (enExample) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61116063U true JPS61116063U (enExample) 1986-07-22
JPH0236209Y2 JPH0236209Y2 (enExample) 1990-10-02

Family

ID=30764503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984202099U Expired JPH0236209Y2 (enExample) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0236209Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123573A (enExample) * 1973-03-30 1974-11-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123573A (enExample) * 1973-03-30 1974-11-26

Also Published As

Publication number Publication date
JPH0236209Y2 (enExample) 1990-10-02

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