JPS61114139A - 差圧センサ - Google Patents

差圧センサ

Info

Publication number
JPS61114139A
JPS61114139A JP23582484A JP23582484A JPS61114139A JP S61114139 A JPS61114139 A JP S61114139A JP 23582484 A JP23582484 A JP 23582484A JP 23582484 A JP23582484 A JP 23582484A JP S61114139 A JPS61114139 A JP S61114139A
Authority
JP
Japan
Prior art keywords
diaphragm
hole
layer
differential pressure
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23582484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536737B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Ikeda
恭一 池田
Katsumi Isozaki
克巳 磯崎
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP23582484A priority Critical patent/JPS61114139A/ja
Publication of JPS61114139A publication Critical patent/JPS61114139A/ja
Publication of JPH0536737B2 publication Critical patent/JPH0536737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP23582484A 1984-11-08 1984-11-08 差圧センサ Granted JPS61114139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23582484A JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23582484A JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Publications (2)

Publication Number Publication Date
JPS61114139A true JPS61114139A (ja) 1986-05-31
JPH0536737B2 JPH0536737B2 (enrdf_load_stackoverflow) 1993-05-31

Family

ID=16991800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23582484A Granted JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Country Status (1)

Country Link
JP (1) JPS61114139A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824636A1 (fr) * 2001-05-10 2002-11-15 Schlumberger Services Petrol Capteur de pression microelectronique a resonateur supportant des pressions elevees

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526487A (en) * 1978-05-30 1980-02-25 Itt Pressure converter and producing same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526487A (en) * 1978-05-30 1980-02-25 Itt Pressure converter and producing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824636A1 (fr) * 2001-05-10 2002-11-15 Schlumberger Services Petrol Capteur de pression microelectronique a resonateur supportant des pressions elevees
WO2003001171A3 (en) * 2001-05-10 2003-03-06 Schlumberger Services Petrol A resonance-type microelectronic pressure sensor that withstands high pressures
US6966228B2 (en) 2001-05-10 2005-11-22 Schlumberger Technology Corporation Resonator-type microelectronic pressure sensor that withstands high pressures

Also Published As

Publication number Publication date
JPH0536737B2 (enrdf_load_stackoverflow) 1993-05-31

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