JPH0536737B2 - - Google Patents

Info

Publication number
JPH0536737B2
JPH0536737B2 JP59235824A JP23582484A JPH0536737B2 JP H0536737 B2 JPH0536737 B2 JP H0536737B2 JP 59235824 A JP59235824 A JP 59235824A JP 23582484 A JP23582484 A JP 23582484A JP H0536737 B2 JPH0536737 B2 JP H0536737B2
Authority
JP
Japan
Prior art keywords
diaphragm
hole
differential pressure
vibrating
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59235824A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61114139A (ja
Inventor
Kyoichi Ikeda
Katsumi Isozaki
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP23582484A priority Critical patent/JPS61114139A/ja
Publication of JPS61114139A publication Critical patent/JPS61114139A/ja
Publication of JPH0536737B2 publication Critical patent/JPH0536737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP23582484A 1984-11-08 1984-11-08 差圧センサ Granted JPS61114139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23582484A JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23582484A JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Publications (2)

Publication Number Publication Date
JPS61114139A JPS61114139A (ja) 1986-05-31
JPH0536737B2 true JPH0536737B2 (enrdf_load_stackoverflow) 1993-05-31

Family

ID=16991800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23582484A Granted JPS61114139A (ja) 1984-11-08 1984-11-08 差圧センサ

Country Status (1)

Country Link
JP (1) JPS61114139A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824636B1 (fr) 2001-05-10 2003-09-05 Schlumberger Services Petrol Capteur de pression microelectronique a resonateur supportant des pressions elevees

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer

Also Published As

Publication number Publication date
JPS61114139A (ja) 1986-05-31

Similar Documents

Publication Publication Date Title
US5473944A (en) Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture
US6642594B2 (en) Single chip multiple range pressure transducer device
US4071838A (en) Solid state force transducer and method of making same
US5060526A (en) Laminated semiconductor sensor with vibrating element
JPH0518050B2 (enrdf_load_stackoverflow)
JP2816635B2 (ja) 半導体圧力センサ
KR20010050327A (ko) 마이크로기계 장치
US6838303B2 (en) Silicon pressure sensor and the manufacturing method thereof
US7013733B2 (en) Silicon resonant type pressure sensor
JPH0536737B2 (enrdf_load_stackoverflow)
JPS60186725A (ja) 圧力センサ
US20060010981A1 (en) Vibration type pressure sensor
JPH0275963A (ja) 半導体センサ
JP2737479B2 (ja) 半導体応力検出装置
JPH0821774A (ja) 半導体圧力センサ及びその製造方法
JPH0628662Y2 (ja) 振動形差圧センサ
JP2770488B2 (ja) 半導体圧力計
JP2507840B2 (ja) 半導体加速度センサ
JPH0810169B2 (ja) 振動形差圧センサ
JPH0468576B2 (enrdf_load_stackoverflow)
JPS61100627A (ja) 振動式歪センサ
JPH06258164A (ja) 半導体圧力センサ
JP2573539Y2 (ja) 半導体圧力センサ
JPH01127931A (ja) 振動形差圧センサ
JPH0554705B2 (enrdf_load_stackoverflow)