FR2824636B1 - Capteur de pression microelectronique a resonateur supportant des pressions elevees - Google Patents

Capteur de pression microelectronique a resonateur supportant des pressions elevees

Info

Publication number
FR2824636B1
FR2824636B1 FR0106170A FR0106170A FR2824636B1 FR 2824636 B1 FR2824636 B1 FR 2824636B1 FR 0106170 A FR0106170 A FR 0106170A FR 0106170 A FR0106170 A FR 0106170A FR 2824636 B1 FR2824636 B1 FR 2824636B1
Authority
FR
France
Prior art keywords
pressure sensor
high pressures
supporting high
resonator supporting
microelectronic pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0106170A
Other languages
English (en)
Other versions
FR2824636A1 (fr
Inventor
Florence Binet
Eric Donzier
Feneyrou Sandrine Lelong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Services Petroliers Schlumberger SA
Original Assignee
Services Petroliers Schlumberger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Services Petroliers Schlumberger SA filed Critical Services Petroliers Schlumberger SA
Priority to FR0106170A priority Critical patent/FR2824636B1/fr
Priority to AU2002319258A priority patent/AU2002319258A1/en
Priority to US10/476,262 priority patent/US6966228B2/en
Priority to PCT/EP2002/006942 priority patent/WO2003001171A2/fr
Priority to GB0324299A priority patent/GB2390680B/en
Publication of FR2824636A1 publication Critical patent/FR2824636A1/fr
Application granted granted Critical
Publication of FR2824636B1 publication Critical patent/FR2824636B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR0106170A 2001-05-10 2001-05-10 Capteur de pression microelectronique a resonateur supportant des pressions elevees Expired - Fee Related FR2824636B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0106170A FR2824636B1 (fr) 2001-05-10 2001-05-10 Capteur de pression microelectronique a resonateur supportant des pressions elevees
AU2002319258A AU2002319258A1 (en) 2001-05-10 2002-04-25 A resonance-type microelectronic pressure sensor that withstands high pressures
US10/476,262 US6966228B2 (en) 2001-05-10 2002-04-25 Resonator-type microelectronic pressure sensor that withstands high pressures
PCT/EP2002/006942 WO2003001171A2 (fr) 2001-05-10 2002-04-25 Detecteur de pressions micro-electroniques du type resonateur resistant aux hautes pressions
GB0324299A GB2390680B (en) 2001-05-10 2002-04-25 A resonance-type microelectronic pressure sensor that withstands high pressures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0106170A FR2824636B1 (fr) 2001-05-10 2001-05-10 Capteur de pression microelectronique a resonateur supportant des pressions elevees

Publications (2)

Publication Number Publication Date
FR2824636A1 FR2824636A1 (fr) 2002-11-15
FR2824636B1 true FR2824636B1 (fr) 2003-09-05

Family

ID=8863111

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0106170A Expired - Fee Related FR2824636B1 (fr) 2001-05-10 2001-05-10 Capteur de pression microelectronique a resonateur supportant des pressions elevees

Country Status (5)

Country Link
US (1) US6966228B2 (fr)
AU (1) AU2002319258A1 (fr)
FR (1) FR2824636B1 (fr)
GB (1) GB2390680B (fr)
WO (1) WO2003001171A2 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7642611B2 (en) * 2004-04-22 2010-01-05 Panasonic Electric Works Co., Ltd. Sensor device, sensor system and methods for manufacturing them
US7499604B1 (en) * 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7409865B2 (en) * 2005-09-30 2008-08-12 General Electric Company Diaphragm structure
JP4932450B2 (ja) * 2006-11-22 2012-05-16 ニッタ株式会社 センサ及びその製造方法
US8418554B2 (en) * 2009-06-01 2013-04-16 The Boeing Company Gyroscope packaging assembly
US8002315B2 (en) * 2009-12-23 2011-08-23 General Electric Corporation Device for measuring fluid properties in caustic environments
US8429976B2 (en) * 2010-05-19 2013-04-30 Schlumberger Technology Corporation Low cost resonator-based pressure transducer
WO2012025840A2 (fr) 2010-08-26 2012-03-01 Schlumberger Canada Limited Appareil et procédé pour équilibre de phase à détection in situ
US9038263B2 (en) 2011-01-13 2015-05-26 Delaware Capital Formation, Inc. Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
JP5880499B2 (ja) * 2013-08-19 2016-03-09 横河電機株式会社 振動式圧力センサ及びその製造方法
US10132156B2 (en) 2014-11-03 2018-11-20 Quartzdyne, Inc. Downhole distributed pressure sensor arrays, downhole pressure sensors, downhole distributed pressure sensor arrays including quartz resonator sensors, and related methods
US9964459B2 (en) 2014-11-03 2018-05-08 Quartzdyne, Inc. Pass-throughs for use with sensor assemblies, sensor assemblies including at least one pass-through and related methods
JP6776143B2 (ja) * 2017-02-03 2020-10-28 横河電機株式会社 水位計測システム
US11015435B2 (en) 2017-12-18 2021-05-25 Quartzdyne, Inc. Distributed sensor arrays for measuring one or more of pressure and temperature and related methods and assemblies
JP7192804B2 (ja) * 2020-01-10 2022-12-20 横河電機株式会社 保護カバー付き水位計

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer
JPS5588356A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Semiconductor device
JPS61114139A (ja) * 1984-11-08 1986-05-31 Yokogawa Hokushin Electric Corp 差圧センサ
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
GB2197069B (en) * 1986-11-03 1990-10-24 Stc Plc Sensor device
US5013693A (en) * 1989-02-16 1991-05-07 Wisconsin Alumni Research Foundation Formation of microstructures with removal of liquid by freezing and sublimation
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
SE506135C2 (sv) * 1990-07-11 1997-11-17 Radi Medical Systems Sensor- och ledarkonstruktion
JP2000114139A (ja) * 1998-10-01 2000-04-21 Nikon Corp 微粒子除去装置
US6182513B1 (en) * 1998-12-23 2001-02-06 Radi Medical Systems Ab Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
US7045868B2 (en) * 2003-07-31 2006-05-16 Motorola, Inc. Wafer-level sealed microdevice having trench isolation and methods for making the same

Also Published As

Publication number Publication date
WO2003001171A2 (fr) 2003-01-03
US20040129086A1 (en) 2004-07-08
GB2390680B (en) 2005-01-19
AU2002319258A1 (en) 2003-01-08
FR2824636A1 (fr) 2002-11-15
GB2390680A (en) 2004-01-14
US6966228B2 (en) 2005-11-22
GB0324299D0 (en) 2003-11-19
WO2003001171A3 (fr) 2003-03-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160129