JPS6110996B2 - - Google Patents

Info

Publication number
JPS6110996B2
JPS6110996B2 JP52110725A JP11072577A JPS6110996B2 JP S6110996 B2 JPS6110996 B2 JP S6110996B2 JP 52110725 A JP52110725 A JP 52110725A JP 11072577 A JP11072577 A JP 11072577A JP S6110996 B2 JPS6110996 B2 JP S6110996B2
Authority
JP
Japan
Prior art keywords
gate
insulating film
substrate
diffusion layer
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52110725A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5444483A (en
Inventor
Takeya Ezaki
Oonori Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11072577A priority Critical patent/JPS5444483A/ja
Publication of JPS5444483A publication Critical patent/JPS5444483A/ja
Publication of JPS6110996B2 publication Critical patent/JPS6110996B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP11072577A 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture Granted JPS5444483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11072577A JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11072577A JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5444483A JPS5444483A (en) 1979-04-07
JPS6110996B2 true JPS6110996B2 (https=) 1986-04-01

Family

ID=14542899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11072577A Granted JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5444483A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223397A (ja) * 1987-03-12 1988-09-16 Tsurumi Mfg Co Ltd 電動遠心ポンプの羽根車

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209350A (en) * 1978-11-03 1980-06-24 International Business Machines Corporation Method for forming diffusions having narrow dimensions utilizing reactive ion etching
US4209349A (en) * 1978-11-03 1980-06-24 International Business Machines Corporation Method for forming a narrow dimensioned mask opening on a silicon body utilizing reactive ion etching
US4256514A (en) * 1978-11-03 1981-03-17 International Business Machines Corporation Method for forming a narrow dimensioned region on a body
US4329186A (en) * 1979-12-20 1982-05-11 Ibm Corporation Simultaneously forming fully implanted DMOS together with enhancement and depletion mode MOSFET devices
JPS59167067A (ja) * 1982-12-28 1984-09-20 マステク，コ−パレイシヤン 電界効果トランジスタの製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223397A (ja) * 1987-03-12 1988-09-16 Tsurumi Mfg Co Ltd 電動遠心ポンプの羽根車

Also Published As

Publication number Publication date
JPS5444483A (en) 1979-04-07

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