JPS61107143A - 光学的表面検査装置 - Google Patents

光学的表面検査装置

Info

Publication number
JPS61107143A
JPS61107143A JP22840884A JP22840884A JPS61107143A JP S61107143 A JPS61107143 A JP S61107143A JP 22840884 A JP22840884 A JP 22840884A JP 22840884 A JP22840884 A JP 22840884A JP S61107143 A JPS61107143 A JP S61107143A
Authority
JP
Japan
Prior art keywords
defect
gate
defects
surface inspection
optical surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22840884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469331B2 (enrdf_load_html_response
Inventor
Yoshimoto Nakajima
中島　与元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22840884A priority Critical patent/JPS61107143A/ja
Publication of JPS61107143A publication Critical patent/JPS61107143A/ja
Publication of JPH0469331B2 publication Critical patent/JPH0469331B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22840884A 1984-10-30 1984-10-30 光学的表面検査装置 Granted JPS61107143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22840884A JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22840884A JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Publications (2)

Publication Number Publication Date
JPS61107143A true JPS61107143A (ja) 1986-05-26
JPH0469331B2 JPH0469331B2 (enrdf_load_html_response) 1992-11-05

Family

ID=16875998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22840884A Granted JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Country Status (1)

Country Link
JP (1) JPS61107143A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014092407A (ja) * 2012-11-01 2014-05-19 Hitachi-Ge Nuclear Energy Ltd 溶接検査装置及び溶接検査方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5187092A (ja) * 1975-01-28 1976-07-30 Canon Kk Hyomenkensasochi
JPS541082A (en) * 1977-06-03 1979-01-06 Omron Tateisi Electronics Co Defect detector
JPS5571937A (en) * 1978-11-24 1980-05-30 Kanebo Ltd Method of and device for inspecting surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5187092A (ja) * 1975-01-28 1976-07-30 Canon Kk Hyomenkensasochi
JPS541082A (en) * 1977-06-03 1979-01-06 Omron Tateisi Electronics Co Defect detector
JPS5571937A (en) * 1978-11-24 1980-05-30 Kanebo Ltd Method of and device for inspecting surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014092407A (ja) * 2012-11-01 2014-05-19 Hitachi-Ge Nuclear Energy Ltd 溶接検査装置及び溶接検査方法

Also Published As

Publication number Publication date
JPH0469331B2 (enrdf_load_html_response) 1992-11-05

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