JPS61107104A - 微細パタ−ン深さ測定方法及びその装置 - Google Patents

微細パタ−ン深さ測定方法及びその装置

Info

Publication number
JPS61107104A
JPS61107104A JP22771984A JP22771984A JPS61107104A JP S61107104 A JPS61107104 A JP S61107104A JP 22771984 A JP22771984 A JP 22771984A JP 22771984 A JP22771984 A JP 22771984A JP S61107104 A JPS61107104 A JP S61107104A
Authority
JP
Japan
Prior art keywords
light
depth
diffracted
order
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22771984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566522B2 (enrdf_load_stackoverflow
Inventor
Minoru Noguchi
稔 野口
Toru Otsubo
徹 大坪
Susumu Aiuchi
進 相内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22771984A priority Critical patent/JPS61107104A/ja
Priority to US06/685,550 priority patent/US4615620A/en
Publication of JPS61107104A publication Critical patent/JPS61107104A/ja
Priority to US07/254,964 priority patent/USRE33424E/en
Publication of JPH0566522B2 publication Critical patent/JPH0566522B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP22771984A 1983-12-26 1984-10-31 微細パタ−ン深さ測定方法及びその装置 Granted JPS61107104A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP22771984A JPS61107104A (ja) 1984-10-31 1984-10-31 微細パタ−ン深さ測定方法及びその装置
US06/685,550 US4615620A (en) 1983-12-26 1984-12-24 Apparatus for measuring the depth of fine engraved patterns
US07/254,964 USRE33424E (en) 1983-12-26 1988-10-07 Apparatus and method for measuring the depth of fine engraved patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22771984A JPS61107104A (ja) 1984-10-31 1984-10-31 微細パタ−ン深さ測定方法及びその装置

Publications (2)

Publication Number Publication Date
JPS61107104A true JPS61107104A (ja) 1986-05-26
JPH0566522B2 JPH0566522B2 (enrdf_load_stackoverflow) 1993-09-22

Family

ID=16865279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22771984A Granted JPS61107104A (ja) 1983-12-26 1984-10-31 微細パタ−ン深さ測定方法及びその装置

Country Status (1)

Country Link
JP (1) JPS61107104A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222208A (ja) * 1987-03-11 1988-09-16 Japan Spectroscopic Co 凹部深さ測定装置
JPH01145504A (ja) * 1987-12-01 1989-06-07 Canon Inc 光学測定装置
JPH0251005A (ja) * 1988-08-12 1990-02-21 Hitachi Ltd 深さ測定方法および装置
US4988198A (en) * 1987-06-22 1991-01-29 Dainippon Screen Mfg. Co., Ltd. Method and apparatus for measuring microlevel difference
US9988779B2 (en) 2013-09-02 2018-06-05 Nausicaa Tolde SARTORI Unmanned mobile device and relative method for treating a snow covered surface, and in particular of glaciers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222208A (ja) * 1987-03-11 1988-09-16 Japan Spectroscopic Co 凹部深さ測定装置
US4988198A (en) * 1987-06-22 1991-01-29 Dainippon Screen Mfg. Co., Ltd. Method and apparatus for measuring microlevel difference
JPH01145504A (ja) * 1987-12-01 1989-06-07 Canon Inc 光学測定装置
JPH0251005A (ja) * 1988-08-12 1990-02-21 Hitachi Ltd 深さ測定方法および装置
US9988779B2 (en) 2013-09-02 2018-06-05 Nausicaa Tolde SARTORI Unmanned mobile device and relative method for treating a snow covered surface, and in particular of glaciers

Also Published As

Publication number Publication date
JPH0566522B2 (enrdf_load_stackoverflow) 1993-09-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term