JPS61102046U - - Google Patents

Info

Publication number

JPS61102046U

JPS61102046U JP18607984U JP18607984U JPS61102046U JP S61102046 U JPS61102046 U JP S61102046U JP 18607984 U JP18607984 U JP 18607984U JP 18607984 U JP18607984 U JP 18607984U JP S61102046 U JPS61102046 U JP S61102046U

Authority

JP

Japan

Prior art keywords

semiconductor device

scribe

etching

separated

crystal plane

Prior art date

1984-12-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 9
• 238000005530 etching Methods 0.000 claims description 4
• 239000013078 crystal Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3