JPS6094724A - ドライエツチング装置 - Google Patents

ドライエツチング装置

Info

Publication number
JPS6094724A
JPS6094724A JP20109683A JP20109683A JPS6094724A JP S6094724 A JPS6094724 A JP S6094724A JP 20109683 A JP20109683 A JP 20109683A JP 20109683 A JP20109683 A JP 20109683A JP S6094724 A JPS6094724 A JP S6094724A
Authority
JP
Japan
Prior art keywords
electrode
etching
dry etching
columnar
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20109683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578171B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tsutomu Tsukada
勉 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp, Anelva Corp filed Critical Canon Anelva Corp
Priority to JP20109683A priority Critical patent/JPS6094724A/ja
Publication of JPS6094724A publication Critical patent/JPS6094724A/ja
Publication of JPH0578171B2 publication Critical patent/JPH0578171B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP20109683A 1983-10-28 1983-10-28 ドライエツチング装置 Granted JPS6094724A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20109683A JPS6094724A (ja) 1983-10-28 1983-10-28 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20109683A JPS6094724A (ja) 1983-10-28 1983-10-28 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS6094724A true JPS6094724A (ja) 1985-05-27
JPH0578171B2 JPH0578171B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-28

Family

ID=16435325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20109683A Granted JPS6094724A (ja) 1983-10-28 1983-10-28 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS6094724A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241335A (ja) * 1985-12-30 1987-10-22 アプライド　マテリアルズ　インコ−ポレ−テツド マグネトロン増強型プラズマエツチング法
JPS63104332A (ja) * 1986-10-06 1988-05-09 エム　シー　エヌ　シー プラズマ加工方法及び装置
EP0665575A1 (en) * 1994-01-28 1995-08-02 Applied Materials, Inc. Plasma processing systems
CN107130214A (zh) * 2017-05-11 2017-09-05 成都西沃克真空科技有限公司 一种蒸发器用可旋转的水冷式电极装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151028A (ja) * 1982-01-26 1983-09-08 マテリアルズ・リサ−チ・コ−ポレ−シヨン 磁気的に強められたプラズマ処理方法および装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151028A (ja) * 1982-01-26 1983-09-08 マテリアルズ・リサ−チ・コ−ポレ−シヨン 磁気的に強められたプラズマ処理方法および装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241335A (ja) * 1985-12-30 1987-10-22 アプライド　マテリアルズ　インコ−ポレ−テツド マグネトロン増強型プラズマエツチング法
JPS63104332A (ja) * 1986-10-06 1988-05-09 エム　シー　エヌ　シー プラズマ加工方法及び装置
EP0665575A1 (en) * 1994-01-28 1995-08-02 Applied Materials, Inc. Plasma processing systems
US5573596A (en) * 1994-01-28 1996-11-12 Applied Materials, Inc. Arc suppression in a plasma processing system
CN107130214A (zh) * 2017-05-11 2017-09-05 成都西沃克真空科技有限公司 一种蒸发器用可旋转的水冷式电极装置

Also Published As

Publication number Publication date
JPH0578171B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-28

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