JPS60945A - 真空連続処理装置 - Google Patents

真空連続処理装置

Info

Publication number
JPS60945A
JPS60945A JP10787483A JP10787483A JPS60945A JP S60945 A JPS60945 A JP S60945A JP 10787483 A JP10787483 A JP 10787483A JP 10787483 A JP10787483 A JP 10787483A JP S60945 A JPS60945 A JP S60945A
Authority
JP
Japan
Prior art keywords
vacuum
chamber
preliminary
reserve
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10787483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358374B2 (enrdf_load_stackoverflow
Inventor
Susumu Ueno
進 上野
Koichi Kuroda
黒田　幸一
Hajime Kitamura
肇 北村
Masaya Tokai
東海　正家
Kenichi Kato
健一 加藤
Nobuyuki Hiraishi
平石　信行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP10787483A priority Critical patent/JPS60945A/ja
Priority to EP84106879A priority patent/EP0130444B1/en
Priority to DE8484106879T priority patent/DE3466414D1/de
Priority to US06/621,373 priority patent/US4501428A/en
Publication of JPS60945A publication Critical patent/JPS60945A/ja
Publication of JPH0358374B2 publication Critical patent/JPH0358374B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP10787483A 1983-06-17 1983-06-17 真空連続処理装置 Granted JPS60945A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10787483A JPS60945A (ja) 1983-06-17 1983-06-17 真空連続処理装置
EP84106879A EP0130444B1 (en) 1983-06-17 1984-06-15 Continuous vacuum treating apparatus
DE8484106879T DE3466414D1 (en) 1983-06-17 1984-06-15 Continuous vacuum treating apparatus
US06/621,373 US4501428A (en) 1983-06-17 1984-06-18 Roll seal boxes for continuous vacuum treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10787483A JPS60945A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Publications (2)

Publication Number Publication Date
JPS60945A true JPS60945A (ja) 1985-01-07
JPH0358374B2 JPH0358374B2 (enrdf_load_stackoverflow) 1991-09-05

Family

ID=14470274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10787483A Granted JPS60945A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Country Status (1)

Country Link
JP (1) JPS60945A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007501328A (ja) * 2003-05-23 2007-01-25 ユジノール（ソシエテ アノニム） 平坦製品上への減圧付着ラインのための密封ロック

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007501328A (ja) * 2003-05-23 2007-01-25 ユジノール（ソシエテ アノニム） 平坦製品上への減圧付着ラインのための密封ロック

Also Published As

Publication number Publication date
JPH0358374B2 (enrdf_load_stackoverflow) 1991-09-05

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