JPS6092836U - クリーニングウェハの保持機構 - Google Patents

クリーニングウェハの保持機構

Info

Publication number
JPS6092836U
JPS6092836U JP18546583U JP18546583U JPS6092836U JP S6092836 U JPS6092836 U JP S6092836U JP 18546583 U JP18546583 U JP 18546583U JP 18546583 U JP18546583 U JP 18546583U JP S6092836 U JPS6092836 U JP S6092836U
Authority
JP
Japan
Prior art keywords
loader
wafer
transports
cleaning wafer
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18546583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS635211Y2 (enrdf_load_stackoverflow
Inventor
矢嶌　淳
秋田　栄一
Original Assignee
安藤電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 安藤電気株式会社 filed Critical 安藤電気株式会社
Priority to JP18546583U priority Critical patent/JPS6092836U/ja
Publication of JPS6092836U publication Critical patent/JPS6092836U/ja
Application granted granted Critical
Publication of JPS635211Y2 publication Critical patent/JPS635211Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18546583U 1983-11-30 1983-11-30 クリーニングウェハの保持機構 Granted JPS6092836U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18546583U JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18546583U JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Publications (2)

Publication Number Publication Date
JPS6092836U true JPS6092836U (ja) 1985-06-25
JPS635211Y2 JPS635211Y2 (enrdf_load_stackoverflow) 1988-02-12

Family

ID=30400854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18546583U Granted JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Country Status (1)

Country Link
JP (1) JPS6092836U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428933A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-surface inspection device
JPS6447041A (en) * 1987-08-18 1989-02-21 Hitachi Electr Eng Wafer surface inspecting equipment
JPH0258348A (ja) * 1988-08-24 1990-02-27 Tokyo Seimitsu Co Ltd プロービング機のクリーニングウェハ収容装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428933A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-surface inspection device
JPS6447041A (en) * 1987-08-18 1989-02-21 Hitachi Electr Eng Wafer surface inspecting equipment
JPH0258348A (ja) * 1988-08-24 1990-02-27 Tokyo Seimitsu Co Ltd プロービング機のクリーニングウェハ収容装置

Also Published As

Publication number Publication date
JPS635211Y2 (enrdf_load_stackoverflow) 1988-02-12

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