JPS6428933A - Wafer-surface inspection device - Google Patents
Wafer-surface inspection deviceInfo
- Publication number
- JPS6428933A JPS6428933A JP62184809A JP18480987A JPS6428933A JP S6428933 A JPS6428933 A JP S6428933A JP 62184809 A JP62184809 A JP 62184809A JP 18480987 A JP18480987 A JP 18480987A JP S6428933 A JPS6428933 A JP S6428933A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassettes
- cassette
- inspection device
- unloader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To exchange a right cassette for a left cassette without mutual interference by a method wherein cassettes are arranged on the right and the left and a wafer-surface inspection device is arranged at the central back of these cassettes. CONSTITUTION:Three cassettes 3, 4, 5, are mounted on a table of a device in an interchangeable manner at an external periphery of a wafer handling mechanism 1; these cassettes are positioned on the front side and on the right side and the left side of a wafer surface inspection device 30. A wafer 7 taken out from the cassette 3 on the side of a loader by means of the wafer handling mechanism 1 is inserted into a surface-state measuring unit 6; an inspected wafer 7 is taken out from the surface-state measuring unit 6; this wafer is loaded into the cassette 4 or 5 as a designated unloader cassette in accordance with an inspected result. If the water 7 to be housed in these unloader cassettes becomes full, the cassettes 4, 5 are detached from the table of the device; a new empty unloader cassette is mounted.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62184809A JPH0622258B2 (en) | 1987-07-24 | 1987-07-24 | Wafer surface inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62184809A JPH0622258B2 (en) | 1987-07-24 | 1987-07-24 | Wafer surface inspection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6428933A true JPS6428933A (en) | 1989-01-31 |
JPH0622258B2 JPH0622258B2 (en) | 1994-03-23 |
Family
ID=16159669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62184809A Expired - Lifetime JPH0622258B2 (en) | 1987-07-24 | 1987-07-24 | Wafer surface inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0622258B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5460478A (en) * | 1992-02-05 | 1995-10-24 | Tokyo Electron Limited | Method for processing wafer-shaped substrates |
US6034000A (en) * | 1997-07-28 | 2000-03-07 | Applied Materials, Inc. | Multiple loadlock system |
US6763281B2 (en) | 1999-04-19 | 2004-07-13 | Applied Materials, Inc | Apparatus for alignment of automated workpiece handling systems |
US7158857B2 (en) | 1999-04-19 | 2007-01-02 | Applied Materials, Inc. | Method and apparatus for aligning a cassette |
CN109142389A (en) * | 2018-08-31 | 2019-01-04 | 江苏英锐半导体有限公司 | A kind of wafer flow surface defect detection apparatus |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58216835A (en) * | 1982-05-25 | 1983-12-16 | ウイント・ライツ・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | Automatic conveyor for discoid body |
JPS6092836U (en) * | 1983-11-30 | 1985-06-25 | 安藤電気株式会社 | Cleaning wafer holding mechanism |
JPS61168236A (en) * | 1985-01-21 | 1986-07-29 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of wafer |
JPS61176129A (en) * | 1985-01-31 | 1986-08-07 | Nippon Kogaku Kk <Nikon> | Carrier system of substrate |
JPS61228640A (en) * | 1985-04-03 | 1986-10-11 | Canon Inc | Wafer processing apparatus |
JPS61191886U (en) * | 1985-05-21 | 1986-11-29 |
-
1987
- 1987-07-24 JP JP62184809A patent/JPH0622258B2/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58216835A (en) * | 1982-05-25 | 1983-12-16 | ウイント・ライツ・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | Automatic conveyor for discoid body |
JPS6092836U (en) * | 1983-11-30 | 1985-06-25 | 安藤電気株式会社 | Cleaning wafer holding mechanism |
JPS61168236A (en) * | 1985-01-21 | 1986-07-29 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of wafer |
JPS61176129A (en) * | 1985-01-31 | 1986-08-07 | Nippon Kogaku Kk <Nikon> | Carrier system of substrate |
JPS61228640A (en) * | 1985-04-03 | 1986-10-11 | Canon Inc | Wafer processing apparatus |
JPS61191886U (en) * | 1985-05-21 | 1986-11-29 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5460478A (en) * | 1992-02-05 | 1995-10-24 | Tokyo Electron Limited | Method for processing wafer-shaped substrates |
US6034000A (en) * | 1997-07-28 | 2000-03-07 | Applied Materials, Inc. | Multiple loadlock system |
US6450750B1 (en) | 1997-07-28 | 2002-09-17 | Applied Materials, Inc. | Multiple loadlock system |
US6763281B2 (en) | 1999-04-19 | 2004-07-13 | Applied Materials, Inc | Apparatus for alignment of automated workpiece handling systems |
US7158857B2 (en) | 1999-04-19 | 2007-01-02 | Applied Materials, Inc. | Method and apparatus for aligning a cassette |
CN109142389A (en) * | 2018-08-31 | 2019-01-04 | 江苏英锐半导体有限公司 | A kind of wafer flow surface defect detection apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0622258B2 (en) | 1994-03-23 |
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