JPS6428933A - Wafer-surface inspection device - Google Patents

Wafer-surface inspection device

Info

Publication number
JPS6428933A
JPS6428933A JP62184809A JP18480987A JPS6428933A JP S6428933 A JPS6428933 A JP S6428933A JP 62184809 A JP62184809 A JP 62184809A JP 18480987 A JP18480987 A JP 18480987A JP S6428933 A JPS6428933 A JP S6428933A
Authority
JP
Japan
Prior art keywords
wafer
cassettes
cassette
inspection device
unloader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62184809A
Other languages
Japanese (ja)
Other versions
JPH0622258B2 (en
Inventor
Tsutomu Nakadai
Tsunemi Fukushima
Tsutomu Hongo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP62184809A priority Critical patent/JPH0622258B2/en
Publication of JPS6428933A publication Critical patent/JPS6428933A/en
Publication of JPH0622258B2 publication Critical patent/JPH0622258B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To exchange a right cassette for a left cassette without mutual interference by a method wherein cassettes are arranged on the right and the left and a wafer-surface inspection device is arranged at the central back of these cassettes. CONSTITUTION:Three cassettes 3, 4, 5, are mounted on a table of a device in an interchangeable manner at an external periphery of a wafer handling mechanism 1; these cassettes are positioned on the front side and on the right side and the left side of a wafer surface inspection device 30. A wafer 7 taken out from the cassette 3 on the side of a loader by means of the wafer handling mechanism 1 is inserted into a surface-state measuring unit 6; an inspected wafer 7 is taken out from the surface-state measuring unit 6; this wafer is loaded into the cassette 4 or 5 as a designated unloader cassette in accordance with an inspected result. If the water 7 to be housed in these unloader cassettes becomes full, the cassettes 4, 5 are detached from the table of the device; a new empty unloader cassette is mounted.
JP62184809A 1987-07-24 1987-07-24 Wafer surface inspection device Expired - Lifetime JPH0622258B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62184809A JPH0622258B2 (en) 1987-07-24 1987-07-24 Wafer surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62184809A JPH0622258B2 (en) 1987-07-24 1987-07-24 Wafer surface inspection device

Publications (2)

Publication Number Publication Date
JPS6428933A true JPS6428933A (en) 1989-01-31
JPH0622258B2 JPH0622258B2 (en) 1994-03-23

Family

ID=16159669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62184809A Expired - Lifetime JPH0622258B2 (en) 1987-07-24 1987-07-24 Wafer surface inspection device

Country Status (1)

Country Link
JP (1) JPH0622258B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460478A (en) * 1992-02-05 1995-10-24 Tokyo Electron Limited Method for processing wafer-shaped substrates
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US7158857B2 (en) 1999-04-19 2007-01-02 Applied Materials, Inc. Method and apparatus for aligning a cassette
CN109142389A (en) * 2018-08-31 2019-01-04 江苏英锐半导体有限公司 A kind of wafer flow surface defect detection apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216835A (en) * 1982-05-25 1983-12-16 ウイント・ライツ・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング Automatic conveyor for discoid body
JPS6092836U (en) * 1983-11-30 1985-06-25 安藤電気株式会社 Cleaning wafer holding mechanism
JPS61168236A (en) * 1985-01-21 1986-07-29 Nippon Kogaku Kk <Nikon> Inspecting apparatus of wafer
JPS61176129A (en) * 1985-01-31 1986-08-07 Nippon Kogaku Kk <Nikon> Carrier system of substrate
JPS61228640A (en) * 1985-04-03 1986-10-11 Canon Inc Wafer processing apparatus
JPS61191886U (en) * 1985-05-21 1986-11-29

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216835A (en) * 1982-05-25 1983-12-16 ウイント・ライツ・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング Automatic conveyor for discoid body
JPS6092836U (en) * 1983-11-30 1985-06-25 安藤電気株式会社 Cleaning wafer holding mechanism
JPS61168236A (en) * 1985-01-21 1986-07-29 Nippon Kogaku Kk <Nikon> Inspecting apparatus of wafer
JPS61176129A (en) * 1985-01-31 1986-08-07 Nippon Kogaku Kk <Nikon> Carrier system of substrate
JPS61228640A (en) * 1985-04-03 1986-10-11 Canon Inc Wafer processing apparatus
JPS61191886U (en) * 1985-05-21 1986-11-29

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460478A (en) * 1992-02-05 1995-10-24 Tokyo Electron Limited Method for processing wafer-shaped substrates
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
US6450750B1 (en) 1997-07-28 2002-09-17 Applied Materials, Inc. Multiple loadlock system
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US7158857B2 (en) 1999-04-19 2007-01-02 Applied Materials, Inc. Method and apparatus for aligning a cassette
CN109142389A (en) * 2018-08-31 2019-01-04 江苏英锐半导体有限公司 A kind of wafer flow surface defect detection apparatus

Also Published As

Publication number Publication date
JPH0622258B2 (en) 1994-03-23

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