JPS6092651A - 半導体集積回路装置 - Google Patents
半導体集積回路装置Info
- Publication number
- JPS6092651A JPS6092651A JP58200392A JP20039283A JPS6092651A JP S6092651 A JPS6092651 A JP S6092651A JP 58200392 A JP58200392 A JP 58200392A JP 20039283 A JP20039283 A JP 20039283A JP S6092651 A JPS6092651 A JP S6092651A
- Authority
- JP
- Japan
- Prior art keywords
- type
- region
- substrate
- oxidation
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/62—Capacitors having potential barriers
- H10D1/64—Variable-capacitance diodes, e.g. varactors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58200392A JPS6092651A (ja) | 1983-10-26 | 1983-10-26 | 半導体集積回路装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58200392A JPS6092651A (ja) | 1983-10-26 | 1983-10-26 | 半導体集積回路装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6092651A true JPS6092651A (ja) | 1985-05-24 |
JPS6349386B2 JPS6349386B2 (enrdf_load_stackoverflow) | 1988-10-04 |
Family
ID=16423560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58200392A Granted JPS6092651A (ja) | 1983-10-26 | 1983-10-26 | 半導体集積回路装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6092651A (enrdf_load_stackoverflow) |
-
1983
- 1983-10-26 JP JP58200392A patent/JPS6092651A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6349386B2 (enrdf_load_stackoverflow) | 1988-10-04 |
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