JPS6092651A - 半導体集積回路装置 - Google Patents

半導体集積回路装置

Info

Publication number
JPS6092651A
JPS6092651A JP58200392A JP20039283A JPS6092651A JP S6092651 A JPS6092651 A JP S6092651A JP 58200392 A JP58200392 A JP 58200392A JP 20039283 A JP20039283 A JP 20039283A JP S6092651 A JPS6092651 A JP S6092651A
Authority
JP
Japan
Prior art keywords
type
region
substrate
oxidation
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58200392A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349386B2 (enrdf_load_stackoverflow
Inventor
Hideyuki Kondo
近藤 日出行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58200392A priority Critical patent/JPS6092651A/ja
Publication of JPS6092651A publication Critical patent/JPS6092651A/ja
Publication of JPS6349386B2 publication Critical patent/JPS6349386B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/761PN junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/62Capacitors having potential barriers
    • H10D1/64Variable-capacitance diodes, e.g. varactors 

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP58200392A 1983-10-26 1983-10-26 半導体集積回路装置 Granted JPS6092651A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58200392A JPS6092651A (ja) 1983-10-26 1983-10-26 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58200392A JPS6092651A (ja) 1983-10-26 1983-10-26 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS6092651A true JPS6092651A (ja) 1985-05-24
JPS6349386B2 JPS6349386B2 (enrdf_load_stackoverflow) 1988-10-04

Family

ID=16423560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58200392A Granted JPS6092651A (ja) 1983-10-26 1983-10-26 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS6092651A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6349386B2 (enrdf_load_stackoverflow) 1988-10-04

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