JPS6092470A - 斜め方向に指向性を有する蒸発源装置 - Google Patents
斜め方向に指向性を有する蒸発源装置Info
- Publication number
- JPS6092470A JPS6092470A JP19918383A JP19918383A JPS6092470A JP S6092470 A JPS6092470 A JP S6092470A JP 19918383 A JP19918383 A JP 19918383A JP 19918383 A JP19918383 A JP 19918383A JP S6092470 A JPS6092470 A JP S6092470A
- Authority
- JP
- Japan
- Prior art keywords
- top end
- vapor
- density
- electron beam
- evaporating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 17
- 238000010894 electron beam technology Methods 0.000 claims abstract description 9
- 230000008020 evaporation Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 5
- 238000002844 melting Methods 0.000 abstract description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 238000007738 vacuum evaporation Methods 0.000 abstract description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19918383A JPS6092470A (ja) | 1983-10-26 | 1983-10-26 | 斜め方向に指向性を有する蒸発源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19918383A JPS6092470A (ja) | 1983-10-26 | 1983-10-26 | 斜め方向に指向性を有する蒸発源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6092470A true JPS6092470A (ja) | 1985-05-24 |
| JPS6363629B2 JPS6363629B2 (enrdf_load_stackoverflow) | 1988-12-08 |
Family
ID=16403517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19918383A Granted JPS6092470A (ja) | 1983-10-26 | 1983-10-26 | 斜め方向に指向性を有する蒸発源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6092470A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2597174A1 (en) * | 2011-11-23 | 2013-05-29 | United Technologies Corporation | Vapor deposition of ceramic coatings |
-
1983
- 1983-10-26 JP JP19918383A patent/JPS6092470A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2597174A1 (en) * | 2011-11-23 | 2013-05-29 | United Technologies Corporation | Vapor deposition of ceramic coatings |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6363629B2 (enrdf_load_stackoverflow) | 1988-12-08 |
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