JPS608926Y2 - 研磨キヤリア - Google Patents
研磨キヤリアInfo
- Publication number
- JPS608926Y2 JPS608926Y2 JP1979062873U JP6287379U JPS608926Y2 JP S608926 Y2 JPS608926 Y2 JP S608926Y2 JP 1979062873 U JP1979062873 U JP 1979062873U JP 6287379 U JP6287379 U JP 6287379U JP S608926 Y2 JPS608926 Y2 JP S608926Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- guide hole
- surface plate
- workpiece
- workpiece guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 title claims description 15
- 239000012050 conventional carrier Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979062873U JPS608926Y2 (ja) | 1979-05-11 | 1979-05-11 | 研磨キヤリア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979062873U JPS608926Y2 (ja) | 1979-05-11 | 1979-05-11 | 研磨キヤリア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55165755U JPS55165755U (index.php) | 1980-11-28 |
| JPS608926Y2 true JPS608926Y2 (ja) | 1985-03-30 |
Family
ID=29296894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979062873U Expired JPS608926Y2 (ja) | 1979-05-11 | 1979-05-11 | 研磨キヤリア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608926Y2 (index.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014200869A (ja) * | 2013-04-03 | 2014-10-27 | サンコースプリング株式会社 | ラッピングキャリア |
| JP6197580B2 (ja) * | 2013-10-29 | 2017-09-20 | 株式会社Sumco | キャリアプレート及びワークの両面研磨装置 |
-
1979
- 1979-05-11 JP JP1979062873U patent/JPS608926Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55165755U (index.php) | 1980-11-28 |
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