JPS6080656U - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS6080656U
JPS6080656U JP17271583U JP17271583U JPS6080656U JP S6080656 U JPS6080656 U JP S6080656U JP 17271583 U JP17271583 U JP 17271583U JP 17271583 U JP17271583 U JP 17271583U JP S6080656 U JPS6080656 U JP S6080656U
Authority
JP
Japan
Prior art keywords
electron
electron beam
lens
excitation
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17271583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228601Y2 (cs
Inventor
節雄 則岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP17271583U priority Critical patent/JPS6080656U/ja
Publication of JPS6080656U publication Critical patent/JPS6080656U/ja
Application granted granted Critical
Publication of JPH0228601Y2 publication Critical patent/JPH0228601Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17271583U 1983-11-08 1983-11-08 電子線装置 Granted JPS6080656U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17271583U JPS6080656U (ja) 1983-11-08 1983-11-08 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17271583U JPS6080656U (ja) 1983-11-08 1983-11-08 電子線装置

Publications (2)

Publication Number Publication Date
JPS6080656U true JPS6080656U (ja) 1985-06-04
JPH0228601Y2 JPH0228601Y2 (cs) 1990-07-31

Family

ID=30376418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17271583U Granted JPS6080656U (ja) 1983-11-08 1983-11-08 電子線装置

Country Status (1)

Country Link
JP (1) JPS6080656U (cs)

Also Published As

Publication number Publication date
JPH0228601Y2 (cs) 1990-07-31

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