JPS6079722A - 電子線露光方法 - Google Patents

電子線露光方法

Info

Publication number
JPS6079722A
JPS6079722A JP58187391A JP18739183A JPS6079722A JP S6079722 A JPS6079722 A JP S6079722A JP 58187391 A JP58187391 A JP 58187391A JP 18739183 A JP18739183 A JP 18739183A JP S6079722 A JPS6079722 A JP S6079722A
Authority
JP
Japan
Prior art keywords
exposure
electron beam
deflection
exposed
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58187391A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Teruaki Okino
輝昭 沖野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58187391A priority Critical patent/JPS6079722A/ja
Publication of JPS6079722A publication Critical patent/JPS6079722A/ja
Publication of JPH056340B2 publication Critical patent/JPH056340B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
JP58187391A 1983-10-06 1983-10-06 電子線露光方法 Granted JPS6079722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58187391A JPS6079722A (ja) 1983-10-06 1983-10-06 電子線露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58187391A JPS6079722A (ja) 1983-10-06 1983-10-06 電子線露光方法

Publications (2)

Publication Number Publication Date
JPS6079722A true JPS6079722A (ja) 1985-05-07
JPH056340B2 JPH056340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-26

Family

ID=16205200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58187391A Granted JPS6079722A (ja) 1983-10-06 1983-10-06 電子線露光方法

Country Status (1)

Country Link
JP (1) JPS6079722A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2339960A (en) * 1998-07-16 2000-02-09 Advantest Corp Charged particle beam exposure with compensation for partial unevenness of the surface of the exposed specimen
US6414325B1 (en) 1998-07-16 2002-07-02 Advantest Corporation Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760205A (en) * 1980-09-30 1982-04-12 Jeol Ltd Exposure be electron beam
JPS57140734U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-02-27 1982-09-03
JPS58119642A (ja) * 1981-12-31 1983-07-16 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子線自動焦点装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760205A (en) * 1980-09-30 1982-04-12 Jeol Ltd Exposure be electron beam
JPS57140734U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-02-27 1982-09-03
JPS58119642A (ja) * 1981-12-31 1983-07-16 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子線自動焦点装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2339960A (en) * 1998-07-16 2000-02-09 Advantest Corp Charged particle beam exposure with compensation for partial unevenness of the surface of the exposed specimen
GB2339960B (en) * 1998-07-16 2001-01-17 Advantest Corp Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial surface unevenness of the specimen
US6414325B1 (en) 1998-07-16 2002-07-02 Advantest Corporation Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen

Also Published As

Publication number Publication date
JPH056340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-26

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