JPS6079710A - 半導体ウエハカセツトのストツカ - Google Patents

半導体ウエハカセツトのストツカ

Info

Publication number
JPS6079710A
JPS6079710A JP18735283A JP18735283A JPS6079710A JP S6079710 A JPS6079710 A JP S6079710A JP 18735283 A JP18735283 A JP 18735283A JP 18735283 A JP18735283 A JP 18735283A JP S6079710 A JPS6079710 A JP S6079710A
Authority
JP
Japan
Prior art keywords
shelf
guide rail
guide
shelves
stocker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18735283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447450B2 (enrdf_load_stackoverflow
Inventor
Ryozo Sato
佐藤　亮三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP18735283A priority Critical patent/JPS6079710A/ja
Priority to US06/650,886 priority patent/US4615430A/en
Publication of JPS6079710A publication Critical patent/JPS6079710A/ja
Publication of JPH0447450B2 publication Critical patent/JPH0447450B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
    • B65G1/127—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like the circuit being confined in a vertical plane

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
JP18735283A 1983-10-06 1983-10-06 半導体ウエハカセツトのストツカ Granted JPS6079710A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP18735283A JPS6079710A (ja) 1983-10-06 1983-10-06 半導体ウエハカセツトのストツカ
US06/650,886 US4615430A (en) 1983-10-06 1984-09-17 Precision pallet stacking type storage system for use in clean environment or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18735283A JPS6079710A (ja) 1983-10-06 1983-10-06 半導体ウエハカセツトのストツカ

Publications (2)

Publication Number Publication Date
JPS6079710A true JPS6079710A (ja) 1985-05-07
JPH0447450B2 JPH0447450B2 (enrdf_load_stackoverflow) 1992-08-04

Family

ID=16204486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18735283A Granted JPS6079710A (ja) 1983-10-06 1983-10-06 半導体ウエハカセツトのストツカ

Country Status (1)

Country Link
JP (1) JPS6079710A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125844A (ja) * 1987-11-10 1989-05-18 Tokyo Electron Ltd プローブ装置
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039844A (ja) * 1983-08-12 1985-03-01 Mitsubishi Electric Corp 物品の収納装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039844A (ja) * 1983-08-12 1985-03-01 Mitsubishi Electric Corp 物品の収納装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125844A (ja) * 1987-11-10 1989-05-18 Tokyo Electron Ltd プローブ装置
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置

Also Published As

Publication number Publication date
JPH0447450B2 (enrdf_load_stackoverflow) 1992-08-04

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