JPH0452622B2 - - Google Patents
Info
- Publication number
- JPH0452622B2 JPH0452622B2 JP7732084A JP7732084A JPH0452622B2 JP H0452622 B2 JPH0452622 B2 JP H0452622B2 JP 7732084 A JP7732084 A JP 7732084A JP 7732084 A JP7732084 A JP 7732084A JP H0452622 B2 JPH0452622 B2 JP H0452622B2
- Authority
- JP
- Japan
- Prior art keywords
- shelf
- shelves
- guide rail
- stocker
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 25
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 14
- 239000000428 dust Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
- B65G1/127—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like the circuit being confined in a vertical plane
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7732084A JPS60220924A (ja) | 1984-04-17 | 1984-04-17 | 半導体ウエハカセツトのストツカ |
| US06/650,886 US4615430A (en) | 1983-10-06 | 1984-09-17 | Precision pallet stacking type storage system for use in clean environment or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7732084A JPS60220924A (ja) | 1984-04-17 | 1984-04-17 | 半導体ウエハカセツトのストツカ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60220924A JPS60220924A (ja) | 1985-11-05 |
| JPH0452622B2 true JPH0452622B2 (enrdf_load_stackoverflow) | 1992-08-24 |
Family
ID=13630638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7732084A Granted JPS60220924A (ja) | 1983-10-06 | 1984-04-17 | 半導体ウエハカセツトのストツカ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60220924A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4986715A (en) * | 1988-07-13 | 1991-01-22 | Tokyo Electron Limited | Stock unit for storing carriers |
-
1984
- 1984-04-17 JP JP7732084A patent/JPS60220924A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60220924A (ja) | 1985-11-05 |