JPS607766A - 固体撮像素子の製法 - Google Patents

固体撮像素子の製法

Info

Publication number
JPS607766A
JPS607766A JP58115476A JP11547683A JPS607766A JP S607766 A JPS607766 A JP S607766A JP 58115476 A JP58115476 A JP 58115476A JP 11547683 A JP11547683 A JP 11547683A JP S607766 A JPS607766 A JP S607766A
Authority
JP
Japan
Prior art keywords
island region
ion implantation
solid
impurity concentration
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58115476A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522397B2 (enrdf_load_stackoverflow
Inventor
Takashi Shimada
孝 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP58115476A priority Critical patent/JPS607766A/ja
Publication of JPS607766A publication Critical patent/JPS607766A/ja
Publication of JPH0522397B2 publication Critical patent/JPH0522397B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/153—Two-dimensional or three-dimensional array CCD image sensors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
JP58115476A 1983-06-27 1983-06-27 固体撮像素子の製法 Granted JPS607766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58115476A JPS607766A (ja) 1983-06-27 1983-06-27 固体撮像素子の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58115476A JPS607766A (ja) 1983-06-27 1983-06-27 固体撮像素子の製法

Publications (2)

Publication Number Publication Date
JPS607766A true JPS607766A (ja) 1985-01-16
JPH0522397B2 JPH0522397B2 (enrdf_load_stackoverflow) 1993-03-29

Family

ID=14663471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58115476A Granted JPS607766A (ja) 1983-06-27 1983-06-27 固体撮像素子の製法

Country Status (1)

Country Link
JP (1) JPS607766A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658497A (en) * 1983-01-03 1987-04-21 Rca Corporation Method of making an imaging array having a higher sensitivity

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755672A (en) * 1980-09-19 1982-04-02 Nec Corp Solid-state image pickup device and its driving method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755672A (en) * 1980-09-19 1982-04-02 Nec Corp Solid-state image pickup device and its driving method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658497A (en) * 1983-01-03 1987-04-21 Rca Corporation Method of making an imaging array having a higher sensitivity

Also Published As

Publication number Publication date
JPH0522397B2 (enrdf_load_stackoverflow) 1993-03-29

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