JPS60748A - Probe card for semiconductor - Google Patents

Abstract

PURPOSE:To eliminate the displacement in the horizontal direction due to overdrive by a method wherein a needle is constituted of two beams fixed to a needle supporting part and a needle point part by which the point and the point of the two beams are linked. CONSTITUTION:Two beams 13 and 14 are fixed to a needle supporting part 11 fixed to a printed circuit board 10, and the point and the point of the beams 13 and 14 are linked by a needle point part 15. When the length between the fixed part and the fixed part of the beams 13 and 14 at the needle supporting part 11 is set at (a), the lengths of the beams 13 and 14 are respectively set at (b) and (c), and the length of the needle point part 15 is set at (d), a quadrilateral is constituted of sides (a), (b), (c) and (d), making the side (a) longer than the side (d). In case an overdrive amount (y) is applied, the displacement (x) in the horizontal direction of the needle point 15 can be almost eliminated by approprietly setting the lengths of (c) and (d) on condition of a>d.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a probe card for semiconductors, and particularly to a probe card for semiconductor wafers and the like.

[Background of the invention]

As shown in FIG. 1, a conventional probe card for a half-wrapped body consists of a needle 3 fixed to a needle support part 2 to which a printed circuit board 11 is fixed.

However, in such a probe card, when the needle tip 5 is pressed against the semiconductor wafer probe pad 4 and an overdrive my is applied during the blowing process, the needle tip 5 is elastically deformed into a circular arc with a radius R7, and the needle tip 5 deforms horizontally. A displacement X occurs. This horizontal displacement X causes large scars on the pad 4, reducing the reliability of the completed device.

In addition, since horizontal displacement X occurs during alignment work during brobbing chestnut making, it is difficult to determine the alignment point, and the work requires skill.

[Purpose of the invention]

An object of the present invention is to provide a probe card for semiconductors that does not cause horizontal displacement even when overdrive is applied to the needle tip, and that can maintain a constant value even when horizontal displacement is required. There it is.

[Narrowness of the invention]

In the present invention, a needle is configured by two beams fixed to a needle support part and a needle tip part connecting the tips of the beams, and a part between the fixed parts of the beams of the needle support part and a needle tip part connecting the tips of the beams. The beam and the needle tip have a quadrilateral shape or a shape similar to this, and the length between the beam fixing parts of the needle support part is longer than the length of the needle tip. .

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG. The needle 12 fixed to the needle support 11 fixed to the printed circuit board 10ζ has two beams 13.14 fixed to the needle support 11 and a needle tip 15 connecting the tips of the beams 13.14. It is composed of. Then, as shown in the 31st M1f, the needle support part 11
Let the length between the fixed parts of the beams 13.14 be a1, the length of the beams 13.14 be respectively c, and the length of the needle tip 15 be d, then these sides a1b, c, and d are the four sides. In shape,
In addition, side a is formed longer than side d.

Next, the effect will be explained. When an overdrive amount y is applied, the side is elastically deformed in a shape close to a circular arc with a radius of 2, and the side C with a radius of R3. Therefore, if the lengths of c and d are determined appropriately under the conditions of a) and d, the horizontal displacement X of the needle tip 15 can be almost eliminated. Also, to obtain good electrical contact to the wafer probe pad,
Even if a slightly appropriate horizontal displacement X is required, a)
By appropriately determining the lengths of c and d under the condition of d, a stable horizontal displacement X can be obtained with little influence on the overdrive amount yf.

In the above embodiment, the beams 13, 14 and the needle tip 15? (ii) Although it is formed into a shoreline shape, it may be formed into a curved line or two or more straight lines and assembled.

〔Effect of the invention〕

According to the present invention, when an overdrive amount is applied,
It is possible to eliminate horizontal displacement, and even if horizontal displacement is required, the value of horizontal displacement can be kept constant without overdrive amount ζ, so it is possible to improve the situation of wafer probe pad scars. Tetsuri becomes easier. Therefore, product reliability in the next process, such as the wire bonding manufacturing process, is improved. Furthermore, since there is no horizontal displacement, alignment margin with the wafer probe pad during probe fabrication increases, fabrication becomes easier, and defective needle misalignment during probe testing is reduced.

[Brief explanation of the drawing]

Fig. 1 is a diagram of a conventional example, Fig. 2 is a side view showing an embodiment of the present invention, and Fig. 3 is a functional explanatory diagram of Fig. 2. 10... Printed circuit board, DESCRIPTION OF SYMBOLS 11... Needle support part, 12... Needle, 13.14... Beam, 15...
...Needle tip. Figure 1 Figure 3

Claims (1)

[Claims] In a probe card in which a needle is fixed to a needle support part fixed to a printed circuit board, the needle consists of two beams fixed to the needle support part and a needle tip part connecting the tips of the beams. , the distance between the fixed parts of the beams of the needle support part, the two beams and the tip of the needle have a quadrilateral shape or a shape similar thereto, and the length between the fixed parts of the beams of the needle support part. A probe card for a semiconductor, characterized in that the length of the needle is longer than the length of the tip of the needle.