JPS607134A - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS607134A
JPS607134A JP58113751A JP11375183A JPS607134A JP S607134 A JPS607134 A JP S607134A JP 58113751 A JP58113751 A JP 58113751A JP 11375183 A JP11375183 A JP 11375183A JP S607134 A JPS607134 A JP S607134A
Authority
JP
Japan
Prior art keywords
discharge
plasma cvd
power source
semiconductor wafer
carbon electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58113751A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475654B2 (enExample
Inventor
Keiichi Kawate
川手　啓一
Satoshi Yano
智 矢野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58113751A priority Critical patent/JPS607134A/ja
Publication of JPS607134A publication Critical patent/JPS607134A/ja
Publication of JPH0475654B2 publication Critical patent/JPH0475654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—
JP58113751A 1983-06-24 1983-06-24 プラズマｃｖｄ装置 Granted JPS607134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58113751A JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58113751A JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS607134A true JPS607134A (ja) 1985-01-14
JPH0475654B2 JPH0475654B2 (enExample) 1992-12-01

Family

ID=14620196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58113751A Granted JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS607134A (enExample)

Also Published As

Publication number Publication date
JPH0475654B2 (enExample) 1992-12-01

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