JPH0475654B2 - - Google Patents

Info

Publication number
JPH0475654B2
JPH0475654B2 JP58113751A JP11375183A JPH0475654B2 JP H0475654 B2 JPH0475654 B2 JP H0475654B2 JP 58113751 A JP58113751 A JP 58113751A JP 11375183 A JP11375183 A JP 11375183A JP H0475654 B2 JPH0475654 B2 JP H0475654B2
Authority
JP
Japan
Prior art keywords
discharge
semiconductor wafer
carbon electrode
plasma cvd
reaction vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58113751A
Other languages
English (en)
Japanese (ja)
Other versions
JPS607134A (ja
Inventor
Keiichi Kawate
Satoshi Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58113751A priority Critical patent/JPS607134A/ja
Publication of JPS607134A publication Critical patent/JPS607134A/ja
Publication of JPH0475654B2 publication Critical patent/JPH0475654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—
JP58113751A 1983-06-24 1983-06-24 プラズマｃｖｄ装置 Granted JPS607134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58113751A JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58113751A JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS607134A JPS607134A (ja) 1985-01-14
JPH0475654B2 true JPH0475654B2 (enExample) 1992-12-01

Family

ID=14620196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58113751A Granted JPS607134A (ja) 1983-06-24 1983-06-24 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS607134A (enExample)

Also Published As

Publication number Publication date
JPS607134A (ja) 1985-01-14

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