JPS6066820A - 位置合わせ及び露光方法 - Google Patents

位置合わせ及び露光方法

Info

Publication number
JPS6066820A
JPS6066820A JP58175356A JP17535683A JPS6066820A JP S6066820 A JPS6066820 A JP S6066820A JP 58175356 A JP58175356 A JP 58175356A JP 17535683 A JP17535683 A JP 17535683A JP S6066820 A JPS6066820 A JP S6066820A
Authority
JP
Japan
Prior art keywords
light
grating
wafer
alignment
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58175356A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Noboru Nomura
登 野村
Koichi Kugimiya
公一 釘宮
Ryukichi Matsumura
松村　隆吉
Taketoshi Yonezawa
米澤　武敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58175356A priority Critical patent/JPS6066820A/ja
Priority to US06/599,734 priority patent/US4636077A/en
Publication of JPS6066820A publication Critical patent/JPS6066820A/ja
Priority to US07/296,721 priority patent/USRE33669E/en
Publication of JPH0441486B2 publication Critical patent/JPH0441486B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP58175356A 1983-04-15 1983-09-22 位置合わせ及び露光方法 Granted JPS6066820A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP58175356A JPS6066820A (ja) 1983-09-22 1983-09-22 位置合わせ及び露光方法
US06/599,734 US4636077A (en) 1983-04-15 1984-04-12 Aligning exposure method
US07/296,721 USRE33669E (en) 1983-04-15 1989-01-12 Aligning exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58175356A JPS6066820A (ja) 1983-09-22 1983-09-22 位置合わせ及び露光方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2147802A Division JPH0334307A (ja) 1990-06-06 1990-06-06 半導体ウエハの露光方法

Publications (2)

Publication Number Publication Date
JPS6066820A true JPS6066820A (ja) 1985-04-17
JPH0441486B2 JPH0441486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-08

Family

ID=15994637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58175356A Granted JPS6066820A (ja) 1983-04-15 1983-09-22 位置合わせ及び露光方法

Country Status (1)

Country Link
JP (1) JPS6066820A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223609A (ja) * 1988-05-26 1990-01-25 American Teleph & Telegr Co <Att> デバイス製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223609A (ja) * 1988-05-26 1990-01-25 American Teleph & Telegr Co <Att> デバイス製造方法

Also Published As

Publication number Publication date
JPH0441486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-08

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