JPS6065789A - 半導体引上機における引上軸横振れ防止装置 - Google Patents

半導体引上機における引上軸横振れ防止装置

Info

Publication number
JPS6065789A
JPS6065789A JP17488083A JP17488083A JPS6065789A JP S6065789 A JPS6065789 A JP S6065789A JP 17488083 A JP17488083 A JP 17488083A JP 17488083 A JP17488083 A JP 17488083A JP S6065789 A JPS6065789 A JP S6065789A
Authority
JP
Japan
Prior art keywords
pulling
guide
shaft
pulling shaft
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17488083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033638B2 (enrdf_load_stackoverflow
Inventor
Takao Takahashi
孝夫 高橋
Shingo Hayashi
信吾 林
Hisataka Sugiyama
杉山　久嵩
Yoshiaki Tada
多田　嘉明
Toshio Oishi
大石　俊夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP17488083A priority Critical patent/JPS6065789A/ja
Publication of JPS6065789A publication Critical patent/JPS6065789A/ja
Publication of JPH033638B2 publication Critical patent/JPH033638B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP17488083A 1983-09-21 1983-09-21 半導体引上機における引上軸横振れ防止装置 Granted JPS6065789A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17488083A JPS6065789A (ja) 1983-09-21 1983-09-21 半導体引上機における引上軸横振れ防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17488083A JPS6065789A (ja) 1983-09-21 1983-09-21 半導体引上機における引上軸横振れ防止装置

Publications (2)

Publication Number Publication Date
JPS6065789A true JPS6065789A (ja) 1985-04-15
JPH033638B2 JPH033638B2 (enrdf_load_stackoverflow) 1991-01-21

Family

ID=15986271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17488083A Granted JPS6065789A (ja) 1983-09-21 1983-09-21 半導体引上機における引上軸横振れ防止装置

Country Status (1)

Country Link
JP (1) JPS6065789A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171987A (ja) * 1986-01-22 1987-07-28 Komatsu Denshi Kinzoku Kk Ｃｚ単結晶製造装置及び直径制御装置
JPS62252396A (ja) * 1986-04-22 1987-11-04 Mitsubishi Metal Corp 単結晶引き上げ装置
JPS63170296A (ja) * 1987-01-09 1988-07-14 Kyushu Denshi Kinzoku Kk Ｃｚ炉内の単結晶シリコン振れ幅検出方法
JPH02279586A (ja) * 1989-04-18 1990-11-15 Shin Etsu Handotai Co Ltd 単結晶引上装置のワイヤー振れ止め機構
US5089239A (en) * 1989-04-18 1992-02-18 Shin-Etsu Handotai Company Limited Wire vibration prevention mechanism for a single crystal pulling apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171987A (ja) * 1986-01-22 1987-07-28 Komatsu Denshi Kinzoku Kk Ｃｚ単結晶製造装置及び直径制御装置
JPS62252396A (ja) * 1986-04-22 1987-11-04 Mitsubishi Metal Corp 単結晶引き上げ装置
JPS63170296A (ja) * 1987-01-09 1988-07-14 Kyushu Denshi Kinzoku Kk Ｃｚ炉内の単結晶シリコン振れ幅検出方法
JPH02279586A (ja) * 1989-04-18 1990-11-15 Shin Etsu Handotai Co Ltd 単結晶引上装置のワイヤー振れ止め機構
US5089239A (en) * 1989-04-18 1992-02-18 Shin-Etsu Handotai Company Limited Wire vibration prevention mechanism for a single crystal pulling apparatus

Also Published As

Publication number Publication date
JPH033638B2 (enrdf_load_stackoverflow) 1991-01-21

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