JPS6065543A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6065543A
JPS6065543A JP58172989A JP17298983A JPS6065543A JP S6065543 A JPS6065543 A JP S6065543A JP 58172989 A JP58172989 A JP 58172989A JP 17298983 A JP17298983 A JP 17298983A JP S6065543 A JPS6065543 A JP S6065543A
Authority
JP
Japan
Prior art keywords
type
region
conductivity type
type region
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58172989A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0456457B2 (cg-RX-API-DMAC10.html
Inventor
Katsuyoshi Washio
勝由 鷲尾
Yasunobu Tanizaki
谷崎　泰信
Masataka Ota
大田　正孝
Makoto Hayashi
誠 林
Tomoyuki Watabe
知行 渡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP58172989A priority Critical patent/JPS6065543A/ja
Publication of JPS6065543A publication Critical patent/JPS6065543A/ja
Publication of JPH0456457B2 publication Critical patent/JPH0456457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/031—
    • H10W10/30—

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
JP58172989A 1983-09-21 1983-09-21 半導体装置の製造方法 Granted JPS6065543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58172989A JPS6065543A (ja) 1983-09-21 1983-09-21 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58172989A JPS6065543A (ja) 1983-09-21 1983-09-21 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6065543A true JPS6065543A (ja) 1985-04-15
JPH0456457B2 JPH0456457B2 (cg-RX-API-DMAC10.html) 1992-09-08

Family

ID=15952110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58172989A Granted JPS6065543A (ja) 1983-09-21 1983-09-21 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6065543A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPH0456457B2 (cg-RX-API-DMAC10.html) 1992-09-08

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