JPS6062491A - 自転及び公転可能な回転式チヤツク - Google Patents

自転及び公転可能な回転式チヤツク

Info

Publication number
JPS6062491A
JPS6062491A JP16702783A JP16702783A JPS6062491A JP S6062491 A JPS6062491 A JP S6062491A JP 16702783 A JP16702783 A JP 16702783A JP 16702783 A JP16702783 A JP 16702783A JP S6062491 A JPS6062491 A JP S6062491A
Authority
JP
Japan
Prior art keywords
chucking
gear
chuck
circular
chuck plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16702783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6238035B2 (enrdf_load_stackoverflow
Inventor
藏野　正彦
城間　貞夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP16702783A priority Critical patent/JPS6062491A/ja
Publication of JPS6062491A publication Critical patent/JPS6062491A/ja
Publication of JPS6238035B2 publication Critical patent/JPS6238035B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping On Spindles (AREA)
  • Manipulator (AREA)
  • Coating Apparatus (AREA)
JP16702783A 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク Granted JPS6062491A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16702783A JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16702783A JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Publications (2)

Publication Number Publication Date
JPS6062491A true JPS6062491A (ja) 1985-04-10
JPS6238035B2 JPS6238035B2 (enrdf_load_stackoverflow) 1987-08-15

Family

ID=15842029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16702783A Granted JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Country Status (1)

Country Link
JP (1) JPS6062491A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101045A (ja) * 1985-10-28 1987-05-11 Toshiba Corp ウエ−ハの中心合せ装置
JPH01287939A (ja) * 1988-05-13 1989-11-20 Fujitsu Ltd ウェハ位置決め機構
JP2012131011A (ja) * 2010-12-24 2012-07-12 Fujikura Ltd 取り外し工具及び取り外し方法
JP2021133442A (ja) * 2020-02-25 2021-09-13 富士精工株式会社 ワーク保持装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101045A (ja) * 1985-10-28 1987-05-11 Toshiba Corp ウエ−ハの中心合せ装置
JPH01287939A (ja) * 1988-05-13 1989-11-20 Fujitsu Ltd ウェハ位置決め機構
JP2012131011A (ja) * 2010-12-24 2012-07-12 Fujikura Ltd 取り外し工具及び取り外し方法
JP2021133442A (ja) * 2020-02-25 2021-09-13 富士精工株式会社 ワーク保持装置

Also Published As

Publication number Publication date
JPS6238035B2 (enrdf_load_stackoverflow) 1987-08-15

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