JPS6059779A - 半導体記憶装置の製造方法 - Google Patents

半導体記憶装置の製造方法

Info

Publication number
JPS6059779A
JPS6059779A JP58168897A JP16889783A JPS6059779A JP S6059779 A JPS6059779 A JP S6059779A JP 58168897 A JP58168897 A JP 58168897A JP 16889783 A JP16889783 A JP 16889783A JP S6059779 A JPS6059779 A JP S6059779A
Authority
JP
Japan
Prior art keywords
film
semiconductor memory
silicon nitride
silicon oxide
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58168897A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259631B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuo Sato
和夫 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP58168897A priority Critical patent/JPS6059779A/ja
Publication of JPS6059779A publication Critical patent/JPS6059779A/ja
Publication of JPH0259631B2 publication Critical patent/JPH0259631B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/69—IGFETs having charge trapping gate insulators, e.g. MNOS transistors

Landscapes

  • Non-Volatile Memory (AREA)
JP58168897A 1983-09-13 1983-09-13 半導体記憶装置の製造方法 Granted JPS6059779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58168897A JPS6059779A (ja) 1983-09-13 1983-09-13 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58168897A JPS6059779A (ja) 1983-09-13 1983-09-13 半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6059779A true JPS6059779A (ja) 1985-04-06
JPH0259631B2 JPH0259631B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-13

Family

ID=15876589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58168897A Granted JPS6059779A (ja) 1983-09-13 1983-09-13 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6059779A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222875A (ja) * 2001-01-25 2002-08-09 Sony Corp 不揮発性半導体記憶素子及びその製造方法
JP2002222876A (ja) * 2001-01-25 2002-08-09 Sony Corp 不揮発性半導体記憶素子及びその製造方法
JP2003068892A (ja) * 2001-08-24 2003-03-07 Sony Corp 不揮発性半導体メモリ装置の製造方法
JP2013131772A (ja) * 2006-12-15 2013-07-04 Nec Corp 不揮発性記憶装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222875A (ja) * 2001-01-25 2002-08-09 Sony Corp 不揮発性半導体記憶素子及びその製造方法
JP2002222876A (ja) * 2001-01-25 2002-08-09 Sony Corp 不揮発性半導体記憶素子及びその製造方法
JP2003068892A (ja) * 2001-08-24 2003-03-07 Sony Corp 不揮発性半導体メモリ装置の製造方法
JP2013131772A (ja) * 2006-12-15 2013-07-04 Nec Corp 不揮発性記憶装置
US8796129B2 (en) 2006-12-15 2014-08-05 Nec Corporation Nonvolatile storage device and method for manufacturing the same in which insulating film is located between first and second impurity diffusion regions but absent on first impurity diffusion region

Also Published As

Publication number Publication date
JPH0259631B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-13

Similar Documents

Publication Publication Date Title
TWI436455B (zh) 半導體-氧化物-氮化物-氧化物-半導體（ｓｏｎｏｓ）氧化物-氮化物-氧化物（ｏｎｏ）堆疊縮放
US6566281B1 (en) Nitrogen-rich barrier layer and structures formed
JP5032056B2 (ja) 不揮発性半導体メモリ装置の製造方法
US4868632A (en) Nonvolatile semiconductor memory
JP2003282746A (ja) 半導体記憶装置及び半導体記憶装置の製造方法
JP2009267366A (ja) 半導体記憶装置及びその製造方法
JP4617574B2 (ja) 不揮発性半導体記憶装置およびその製造方法
JP2002261175A (ja) 不揮発性半導体記憶装置およびその製造方法
JPS6059779A (ja) 半導体記憶装置の製造方法
JPH0259632B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH05129630A (ja) 不揮発性半導体記憶装置の製造方法
US20050064109A1 (en) Method of forming an ultrathin nitride/oxide stack as a gate dielectric
JPS6057674A (ja) 半導体記憶装置の製造方法
JPS603159A (ja) 不揮発性記憶装置の製造方法
JP2506726B2 (ja) 不揮発性記憶装置の製造方法
JP3272007B2 (ja) 電荷トラップ膜の製造方法
JPH0665232B2 (ja) 半導体記憶装置の製造方法
JPS59188977A (ja) 半導体不揮発性記憶装置の製造方法
JPS6357945B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0334672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0888286A (ja) 半導体記憶装置の製造方法
JPS6170763A (ja) 半導体記憶装置の製造方法
JPS61288471A (ja) 半導体記憶装置の製造方法
JPH0195562A (ja) 不揮発性記憶装置の製造方法
JP3271671B2 (ja) 不揮発性半導体記憶装置の製造方法