JPS6057641A - 半導体ウエハ用フアセツトアライナ - Google Patents

半導体ウエハ用フアセツトアライナ

Info

Publication number
JPS6057641A
JPS6057641A JP16597983A JP16597983A JPS6057641A JP S6057641 A JPS6057641 A JP S6057641A JP 16597983 A JP16597983 A JP 16597983A JP 16597983 A JP16597983 A JP 16597983A JP S6057641 A JPS6057641 A JP S6057641A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
alignment rod
aligner
facet
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16597983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249732B2 (enExample
Inventor
Masato Toyoda
正人 豊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16597983A priority Critical patent/JPS6057641A/ja
Publication of JPS6057641A publication Critical patent/JPS6057641A/ja
Publication of JPS6249732B2 publication Critical patent/JPS6249732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding Of Articles To Conveyors (AREA)
JP16597983A 1983-09-07 1983-09-07 半導体ウエハ用フアセツトアライナ Granted JPS6057641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16597983A JPS6057641A (ja) 1983-09-07 1983-09-07 半導体ウエハ用フアセツトアライナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16597983A JPS6057641A (ja) 1983-09-07 1983-09-07 半導体ウエハ用フアセツトアライナ

Publications (2)

Publication Number Publication Date
JPS6057641A true JPS6057641A (ja) 1985-04-03
JPS6249732B2 JPS6249732B2 (enExample) 1987-10-21

Family

ID=15822624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16597983A Granted JPS6057641A (ja) 1983-09-07 1983-09-07 半導体ウエハ用フアセツトアライナ

Country Status (1)

Country Link
JP (1) JPS6057641A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04346041A (ja) * 1991-05-23 1992-12-01 Fuji Electric Co Ltd 圧電式荷重センサとその応用装置および回路

Also Published As

Publication number Publication date
JPS6249732B2 (enExample) 1987-10-21

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