JPS6051693A - GaAlAs混晶単結晶成長方法とその装置 - Google Patents
GaAlAs混晶単結晶成長方法とその装置Info
- Publication number
- JPS6051693A JPS6051693A JP15873383A JP15873383A JPS6051693A JP S6051693 A JPS6051693 A JP S6051693A JP 15873383 A JP15873383 A JP 15873383A JP 15873383 A JP15873383 A JP 15873383A JP S6051693 A JPS6051693 A JP S6051693A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- crystal growth
- raw material
- vessel
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15873383A JPS6051693A (ja) | 1983-08-30 | 1983-08-30 | GaAlAs混晶単結晶成長方法とその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15873383A JPS6051693A (ja) | 1983-08-30 | 1983-08-30 | GaAlAs混晶単結晶成長方法とその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6051693A true JPS6051693A (ja) | 1985-03-23 |
JPS6357398B2 JPS6357398B2 (enrdf_load_stackoverflow) | 1988-11-11 |
Family
ID=15678138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15873383A Granted JPS6051693A (ja) | 1983-08-30 | 1983-08-30 | GaAlAs混晶単結晶成長方法とその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6051693A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01178440U (enrdf_load_stackoverflow) * | 1988-06-08 | 1989-12-20 | ||
DE69122599T2 (de) * | 1990-07-26 | 1997-04-03 | Sumitomo Electric Industries | Verfahren und gerät zur herstellung von einkristallen |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5550619A (en) * | 1978-10-11 | 1980-04-12 | Toshiba Corp | Manufacturing single crystal |
JPS5611675A (en) * | 1979-07-04 | 1981-02-05 | Marantz Japan Inc | Key-touch strength changing circuit for automatic playing piano |
-
1983
- 1983-08-30 JP JP15873383A patent/JPS6051693A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5550619A (en) * | 1978-10-11 | 1980-04-12 | Toshiba Corp | Manufacturing single crystal |
JPS5611675A (en) * | 1979-07-04 | 1981-02-05 | Marantz Japan Inc | Key-touch strength changing circuit for automatic playing piano |
Also Published As
Publication number | Publication date |
---|---|
JPS6357398B2 (enrdf_load_stackoverflow) | 1988-11-11 |
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