JPS6051693A - GaAlAs混晶単結晶成長方法とその装置 - Google Patents

GaAlAs混晶単結晶成長方法とその装置

Info

Publication number
JPS6051693A
JPS6051693A JP15873383A JP15873383A JPS6051693A JP S6051693 A JPS6051693 A JP S6051693A JP 15873383 A JP15873383 A JP 15873383A JP 15873383 A JP15873383 A JP 15873383A JP S6051693 A JPS6051693 A JP S6051693A
Authority
JP
Japan
Prior art keywords
crystal
crystal growth
raw material
vessel
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15873383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6357398B2 (enrdf_load_stackoverflow
Inventor
Toshio Sagawa
佐川 敏男
Tsunehiro Unno
恒弘 海野
Toshiya Toyoshima
豊島 敏也
Junkichi Nakagawa
中川 順吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP15873383A priority Critical patent/JPS6051693A/ja
Publication of JPS6051693A publication Critical patent/JPS6051693A/ja
Publication of JPS6357398B2 publication Critical patent/JPS6357398B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15873383A 1983-08-30 1983-08-30 GaAlAs混晶単結晶成長方法とその装置 Granted JPS6051693A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15873383A JPS6051693A (ja) 1983-08-30 1983-08-30 GaAlAs混晶単結晶成長方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15873383A JPS6051693A (ja) 1983-08-30 1983-08-30 GaAlAs混晶単結晶成長方法とその装置

Publications (2)

Publication Number Publication Date
JPS6051693A true JPS6051693A (ja) 1985-03-23
JPS6357398B2 JPS6357398B2 (enrdf_load_stackoverflow) 1988-11-11

Family

ID=15678138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15873383A Granted JPS6051693A (ja) 1983-08-30 1983-08-30 GaAlAs混晶単結晶成長方法とその装置

Country Status (1)

Country Link
JP (1) JPS6051693A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01178440U (enrdf_load_stackoverflow) * 1988-06-08 1989-12-20
DE69122599T2 (de) * 1990-07-26 1997-04-03 Sumitomo Electric Industries Verfahren und gerät zur herstellung von einkristallen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550619A (en) * 1978-10-11 1980-04-12 Toshiba Corp Manufacturing single crystal
JPS5611675A (en) * 1979-07-04 1981-02-05 Marantz Japan Inc Key-touch strength changing circuit for automatic playing piano

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550619A (en) * 1978-10-11 1980-04-12 Toshiba Corp Manufacturing single crystal
JPS5611675A (en) * 1979-07-04 1981-02-05 Marantz Japan Inc Key-touch strength changing circuit for automatic playing piano

Also Published As

Publication number Publication date
JPS6357398B2 (enrdf_load_stackoverflow) 1988-11-11

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