JPS605124U - semiconductor integrated circuit element - Google Patents
semiconductor integrated circuit elementInfo
- Publication number
- JPS605124U JPS605124U JP9772183U JP9772183U JPS605124U JP S605124 U JPS605124 U JP S605124U JP 9772183 U JP9772183 U JP 9772183U JP 9772183 U JP9772183 U JP 9772183U JP S605124 U JPS605124 U JP S605124U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit element
- semiconductor integrated
- transistor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のIC素子を有する半導体ウェーハの平面
図、第2図は本考案によるIC素子の実記 施例を示
す半導体ウェーハの部分拡大図を含む平4 面図、第3
図は第2図のIC素子における要部のジ 等価回路図
、第4図は第2図のIC素子の部分概寥 略断面図、
第5図は第3図のトランジスタのV−I士 関係図で
ある。 ゛
4・・・・・・半導体ウェーハ、5・・・・・・半導体
集積回路素子(IC素子)、6・・・・・・トランジス
タ、7・・曲性−性測定専用トランジスタ、8・・・・
・・半導体抵抗。Fig. 1 is a plan view of a semiconductor wafer having a conventional IC element, Fig. 2 is a plan view including a partially enlarged view of the semiconductor wafer showing an embodiment of the IC element according to the present invention, and Fig. 3 is a plan view of a semiconductor wafer having a conventional IC element.
The figure is an equivalent circuit diagram of the main parts of the IC element in Figure 2, and Figure 4 is a partial schematic cross-sectional view of the IC element in Figure 2.
FIG. 5 is a V-I relationship diagram of the transistor shown in FIG.゛4...Semiconductor wafer, 5...Semiconductor integrated circuit element (IC element), 6...Transistor, 7...Transistor dedicated to curvature measurement, 8...・・・
...Semiconductor resistance.
Claims (1)
素子であって、その内部に所望のトランジ;りを含む集
積回路要素と独立させて前記トランらスタと同一条件で
且つベースとコレクタ間に半導体抵抗を接続させた特性
測定専用トランジスタイ形成したことを特徴とする半導
体集積回路素子。A plurality of semiconductor collector circuit elements formed on a semiconductor wafer, which are independent of an integrated circuit element including a desired transistor therein, under the same conditions as the transistor, and between a base and a collector. A semiconductor integrated circuit element characterized by forming a transistor exclusively for measuring characteristics to which a resistor is connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9772183U JPS605124U (en) | 1983-06-23 | 1983-06-23 | semiconductor integrated circuit element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9772183U JPS605124U (en) | 1983-06-23 | 1983-06-23 | semiconductor integrated circuit element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS605124U true JPS605124U (en) | 1985-01-14 |
Family
ID=30232322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9772183U Pending JPS605124U (en) | 1983-06-23 | 1983-06-23 | semiconductor integrated circuit element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605124U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7677800B2 (en) | 2007-03-23 | 2010-03-16 | Fujifilm Corporation | Radiological imaging apparatus, radiological imaging method, and program |
-
1983
- 1983-06-23 JP JP9772183U patent/JPS605124U/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7677800B2 (en) | 2007-03-23 | 2010-03-16 | Fujifilm Corporation | Radiological imaging apparatus, radiological imaging method, and program |
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