JPS6046071A - Ｍｉｓ型電界効果トランジスタおよびその製造方法 - Google Patents

Ｍｉｓ型電界効果トランジスタおよびその製造方法

Info

Publication number
JPS6046071A
JPS6046071A JP58153069A JP15306983A JPS6046071A JP S6046071 A JPS6046071 A JP S6046071A JP 58153069 A JP58153069 A JP 58153069A JP 15306983 A JP15306983 A JP 15306983A JP S6046071 A JPS6046071 A JP S6046071A
Authority
JP
Japan
Prior art keywords
dirt
conductivity type
insulating film
type impurity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58153069A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053135B2 (enrdf_load_stackoverflow
Inventor
Akio Kita
北　明夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58153069A priority Critical patent/JPS6046071A/ja
Publication of JPS6046071A publication Critical patent/JPS6046071A/ja
Publication of JPH053135B2 publication Critical patent/JPH053135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/608—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having non-planar bodies, e.g. having recessed gate electrodes
JP58153069A 1983-08-24 1983-08-24 Ｍｉｓ型電界効果トランジスタおよびその製造方法 Granted JPS6046071A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58153069A JPS6046071A (ja) 1983-08-24 1983-08-24 Ｍｉｓ型電界効果トランジスタおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58153069A JPS6046071A (ja) 1983-08-24 1983-08-24 Ｍｉｓ型電界効果トランジスタおよびその製造方法

Publications (2)

Publication Number Publication Date
JPS6046071A true JPS6046071A (ja) 1985-03-12
JPH053135B2 JPH053135B2 (enrdf_load_stackoverflow) 1993-01-14

Family

ID=15554302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58153069A Granted JPS6046071A (ja) 1983-08-24 1983-08-24 Ｍｉｓ型電界効果トランジスタおよびその製造方法

Country Status (1)

Country Link
JP (1) JPS6046071A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164368A (ja) * 1986-12-26 1988-07-07 Nec Corp 絶縁ゲ−ト型半導体装置
US4876213A (en) * 1988-10-31 1989-10-24 Motorola, Inc. Salicided source/drain structure
US5798291A (en) * 1995-03-20 1998-08-25 Lg Semicon Co., Ltd. Method of making a semiconductor device with recessed source and drain

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164368A (ja) * 1986-12-26 1988-07-07 Nec Corp 絶縁ゲ−ト型半導体装置
US4876213A (en) * 1988-10-31 1989-10-24 Motorola, Inc. Salicided source/drain structure
US5798291A (en) * 1995-03-20 1998-08-25 Lg Semicon Co., Ltd. Method of making a semiconductor device with recessed source and drain

Also Published As

Publication number Publication date
JPH053135B2 (enrdf_load_stackoverflow) 1993-01-14

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