JPS6044404A - クリ−ンル−ム内の荷保管設備 - Google Patents

クリ−ンル−ム内の荷保管設備

Info

Publication number
JPS6044404A
JPS6044404A JP15067383A JP15067383A JPS6044404A JP S6044404 A JPS6044404 A JP S6044404A JP 15067383 A JP15067383 A JP 15067383A JP 15067383 A JP15067383 A JP 15067383A JP S6044404 A JPS6044404 A JP S6044404A
Authority
JP
Japan
Prior art keywords
clean room
shelves
air
shelf
clean air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15067383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141561B2 (enrdf_load_html_response
Inventor
Takehide Hayashi
武秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Daifuku Machinery Works Ltd
Original Assignee
Daifuku Co Ltd
Daifuku Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd, Daifuku Machinery Works Ltd filed Critical Daifuku Co Ltd
Priority to JP15067383A priority Critical patent/JPS6044404A/ja
Publication of JPS6044404A publication Critical patent/JPS6044404A/ja
Publication of JPH0141561B2 publication Critical patent/JPH0141561B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ventilation (AREA)
  • Warehouses Or Storage Devices (AREA)
JP15067383A 1983-08-17 1983-08-17 クリ−ンル−ム内の荷保管設備 Granted JPS6044404A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15067383A JPS6044404A (ja) 1983-08-17 1983-08-17 クリ−ンル−ム内の荷保管設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15067383A JPS6044404A (ja) 1983-08-17 1983-08-17 クリ−ンル−ム内の荷保管設備

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2340767A Division JPH0649523B2 (ja) 1990-11-30 1990-11-30 クリ−ンル−ム内の荷保管設備

Publications (2)

Publication Number Publication Date
JPS6044404A true JPS6044404A (ja) 1985-03-09
JPH0141561B2 JPH0141561B2 (enrdf_load_html_response) 1989-09-06

Family

ID=15501968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15067383A Granted JPS6044404A (ja) 1983-08-17 1983-08-17 クリ−ンル−ム内の荷保管設備

Country Status (1)

Country Link
JP (1) JPS6044404A (enrdf_load_html_response)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263503A (ja) * 1985-05-16 1986-11-21 Tokyo Electron Ltd 清浄化装置
JPS61263502A (ja) * 1985-05-16 1986-11-21 Tokyo Electron Ltd 清浄化装置
JPS6240432U (enrdf_load_html_response) * 1985-08-30 1987-03-11
JPS62121102A (ja) * 1985-11-20 1987-06-02 Teru Saamuko Kk 炉処理装置
JPS63116406U (enrdf_load_html_response) * 1987-01-20 1988-07-27
JPH03249006A (ja) * 1990-02-27 1991-11-07 Daifuku Co Ltd 除電装置付きの荷保管装置
JPH05132110A (ja) * 1991-11-07 1993-05-28 Daifuku Co Ltd 除電装置付き荷捌装置
JP2013216482A (ja) * 2012-04-12 2013-10-24 Murata Machinery Ltd 保管庫
WO2014067164A1 (zh) * 2012-10-29 2014-05-08 深圳市华星光电技术有限公司 一种堆垛机及静电消除装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263503A (ja) * 1985-05-16 1986-11-21 Tokyo Electron Ltd 清浄化装置
JPS61263502A (ja) * 1985-05-16 1986-11-21 Tokyo Electron Ltd 清浄化装置
JPS6240432U (enrdf_load_html_response) * 1985-08-30 1987-03-11
JPS62121102A (ja) * 1985-11-20 1987-06-02 Teru Saamuko Kk 炉処理装置
JPS63116406U (enrdf_load_html_response) * 1987-01-20 1988-07-27
JPH03249006A (ja) * 1990-02-27 1991-11-07 Daifuku Co Ltd 除電装置付きの荷保管装置
JPH05132110A (ja) * 1991-11-07 1993-05-28 Daifuku Co Ltd 除電装置付き荷捌装置
JP2013216482A (ja) * 2012-04-12 2013-10-24 Murata Machinery Ltd 保管庫
WO2014067164A1 (zh) * 2012-10-29 2014-05-08 深圳市华星光电技术有限公司 一种堆垛机及静电消除装置

Also Published As

Publication number Publication date
JPH0141561B2 (enrdf_load_html_response) 1989-09-06

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