JPS6037254Y2 - 研摩装置 - Google Patents

研摩装置

Info

Publication number
JPS6037254Y2
JPS6037254Y2 JP1980154227U JP15422780U JPS6037254Y2 JP S6037254 Y2 JPS6037254 Y2 JP S6037254Y2 JP 1980154227 U JP1980154227 U JP 1980154227U JP 15422780 U JP15422780 U JP 15422780U JP S6037254 Y2 JPS6037254 Y2 JP S6037254Y2
Authority
JP
Japan
Prior art keywords
pressure plate
plate
workpiece
lever
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980154227U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5775960U (enrdf_load_stackoverflow
Inventor
初雪 新井
誠一 前田
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP1980154227U priority Critical patent/JPS6037254Y2/ja
Publication of JPS5775960U publication Critical patent/JPS5775960U/ja
Application granted granted Critical
Publication of JPS6037254Y2 publication Critical patent/JPS6037254Y2/ja
Expired legal-status Critical Current

Links

JP1980154227U 1980-10-30 1980-10-30 研摩装置 Expired JPS6037254Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980154227U JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980154227U JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Publications (2)

Publication Number Publication Date
JPS5775960U JPS5775960U (enrdf_load_stackoverflow) 1982-05-11
JPS6037254Y2 true JPS6037254Y2 (ja) 1985-11-06

Family

ID=29513457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980154227U Expired JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Country Status (1)

Country Link
JP (1) JPS6037254Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932349U (ja) * 1982-08-23 1984-02-28 スピ−ドフアム株式会社 平面研削装置におけるワ−クの装脱機構
JPS5997857U (ja) * 1982-12-18 1984-07-03 豊田工機株式会社 ラツプ装置
JPH0773822B2 (ja) * 1986-12-03 1995-08-09 スピ−ドフアム株式会社 平面研磨装置

Also Published As

Publication number Publication date
JPS5775960U (enrdf_load_stackoverflow) 1982-05-11

Similar Documents

Publication Publication Date Title
US4583325A (en) Grinding machine
US4104099A (en) Method and apparatus for lapping or polishing materials
US2641879A (en) Mounting method
JP5988192B2 (ja) ワーク貼着方法およびワーク貼着装置
CN1076249C (zh) 给抛光板整形的方法及设备
JP5715540B2 (ja) 固形接着剤を用いたウエーハの貼付方法及び貼付装置
JPS6037254Y2 (ja) 研摩装置
GB1236864A (en) Improvements in or relating to load plate units for use in polishing machines
CN206748200U (zh) 一种自动上蜡下蜡一体机
JPS61265262A (ja) 研磨装置
JPH07237066A (ja) 加工装置のチャック装置
US20050075049A1 (en) Configuration and method for mounting a backing film to a polish head
TWI805732B (zh) 磨削裝置
US6652662B1 (en) Substrate surface processing apparatus and method
JPH0593759U (ja) 研磨装置
JPS6234690Y2 (enrdf_load_stackoverflow)
JPS6427846A (en) Polishing method for lens and its device
JPH071792Y2 (ja) ウエーハ貼付装置
JPS6237631Y2 (enrdf_load_stackoverflow)
JP3812970B2 (ja) 研磨装置および研磨方法
JP2020037181A (ja) ウェハの高精度加工装置
JPS57147241A (en) Bonding method for crystal wafer
JP2889292B2 (ja) 研磨装置
KR100914693B1 (ko) 웨이퍼 왁스 마운팅 장치 및 웨이퍼 왁스 마운팅 방법
KR20190096093A (ko) 웨이퍼 연마 장치용 템플릿 어셈블리 부착장치