JPS5775960U - - Google Patents

Info

Publication number
JPS5775960U
JPS5775960U JP1980154227U JP15422780U JPS5775960U JP S5775960 U JPS5775960 U JP S5775960U JP 1980154227 U JP1980154227 U JP 1980154227U JP 15422780 U JP15422780 U JP 15422780U JP S5775960 U JPS5775960 U JP S5775960U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1980154227U
Other languages
Japanese (ja)
Other versions
JPS6037254Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980154227U priority Critical patent/JPS6037254Y2/ja
Publication of JPS5775960U publication Critical patent/JPS5775960U/ja
Application granted granted Critical
Publication of JPS6037254Y2 publication Critical patent/JPS6037254Y2/ja
Expired legal-status Critical Current

Links

JP1980154227U 1980-10-30 1980-10-30 研摩装置 Expired JPS6037254Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980154227U JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980154227U JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Publications (2)

Publication Number Publication Date
JPS5775960U true JPS5775960U (enrdf_load_stackoverflow) 1982-05-11
JPS6037254Y2 JPS6037254Y2 (ja) 1985-11-06

Family

ID=29513457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980154227U Expired JPS6037254Y2 (ja) 1980-10-30 1980-10-30 研摩装置

Country Status (1)

Country Link
JP (1) JPS6037254Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932349U (ja) * 1982-08-23 1984-02-28 スピ−ドフアム株式会社 平面研削装置におけるワ−クの装脱機構
JPS5997857U (ja) * 1982-12-18 1984-07-03 豊田工機株式会社 ラツプ装置
JPS63144955A (ja) * 1986-12-03 1988-06-17 Speedfam Co Ltd 平面研磨装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932349U (ja) * 1982-08-23 1984-02-28 スピ−ドフアム株式会社 平面研削装置におけるワ−クの装脱機構
JPS5997857U (ja) * 1982-12-18 1984-07-03 豊田工機株式会社 ラツプ装置
JPS63144955A (ja) * 1986-12-03 1988-06-17 Speedfam Co Ltd 平面研磨装置

Also Published As

Publication number Publication date
JPS6037254Y2 (ja) 1985-11-06

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