JPS6036503A - 感光性樹脂 - Google Patents

感光性樹脂

Info

Publication number
JPS6036503A
JPS6036503A JP14588983A JP14588983A JPS6036503A JP S6036503 A JPS6036503 A JP S6036503A JP 14588983 A JP14588983 A JP 14588983A JP 14588983 A JP14588983 A JP 14588983A JP S6036503 A JPS6036503 A JP S6036503A
Authority
JP
Japan
Prior art keywords
polymer
group
formula
reaction
chalcone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14588983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356243B2 (enrdf_load_stackoverflow
Inventor
Shoji Watanabe
渡辺 庄司
Susumu Harashima
進 原島
Noriaki Tsukada
典明 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14588983A priority Critical patent/JPS6036503A/ja
Publication of JPS6036503A publication Critical patent/JPS6036503A/ja
Publication of JPH0356243B2 publication Critical patent/JPH0356243B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP14588983A 1983-08-10 1983-08-10 感光性樹脂 Granted JPS6036503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14588983A JPS6036503A (ja) 1983-08-10 1983-08-10 感光性樹脂

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14588983A JPS6036503A (ja) 1983-08-10 1983-08-10 感光性樹脂

Publications (2)

Publication Number Publication Date
JPS6036503A true JPS6036503A (ja) 1985-02-25
JPH0356243B2 JPH0356243B2 (enrdf_load_stackoverflow) 1991-08-27

Family

ID=15395390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14588983A Granted JPS6036503A (ja) 1983-08-10 1983-08-10 感光性樹脂

Country Status (1)

Country Link
JP (1) JPS6036503A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2765577A1 (fr) * 1997-07-02 1999-01-08 Hoechst Schering Agrevo Sa Nouveaux amides aromatiques, leur procede de preparation et leur application comme pesticides
KR100481014B1 (ko) * 2002-10-04 2005-04-07 주식회사 동진쎄미켐 포토폴리머를 이용한 감광성 수지 조성물

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2765577A1 (fr) * 1997-07-02 1999-01-08 Hoechst Schering Agrevo Sa Nouveaux amides aromatiques, leur procede de preparation et leur application comme pesticides
WO1999001422A1 (en) * 1997-07-02 1999-01-14 Hoechst Schering Agrevo S.A. Aromatic amides, their preparation process and their use as pesticides
KR100481014B1 (ko) * 2002-10-04 2005-04-07 주식회사 동진쎄미켐 포토폴리머를 이용한 감광성 수지 조성물

Also Published As

Publication number Publication date
JPH0356243B2 (enrdf_load_stackoverflow) 1991-08-27

Similar Documents

Publication Publication Date Title
KR102278416B1 (ko) 조성물 및 이를 이용한 디바이스의 제조 방법
JPH05249683A (ja) 感放射線性組成物
FR2788060A1 (fr) Polymere de revetement anti-reflecteur et procede de preparation
JP2000264921A (ja) 有機反射防止重合体およびその製造方法
JP7079647B2 (ja) 組成物及びそれを用いたデバイスの製造方法
Subramanian et al. Photosensitive polymer: synthesis, characterization and properties of a polymer having pendant photocrosslinkable group
Nishikubo et al. Study of photopolymers. XXXIV. Etherification and esterification reactions of polymers with (o, m, or p)‐bromomethylnitrobenzene using the DBU method and the photochemical properties of the resulting polymers
Merrill et al. Photosensitive azide polymers
WO2005114331A1 (ja) レジスト化合物およびレジスト組成物
JPH01103602A (ja) 放射線感応性化合物の又は該化合物に関する改良
JPH11228536A (ja) マレイミド系単量体とその製造方法、脂肪族環状オレフィン系単量体とその製造方法、共重合体樹脂とその製造方法、フォトレジストとその製造方法、および半導体素子
JPH035739B2 (enrdf_load_stackoverflow)
US5240811A (en) Photogenerated polycarbodiimides from poly(tetrazole-5-thiones) and use in the preparation of coatings and deep-UV photoresists
JP7249198B2 (ja) オニウム塩、組成物及びそれを用いたデバイスの製造方法
JP2638887B2 (ja) 感光性組成物
NL8401365A (nl) Werkwijze voor het maken van halfgeleiderinrichtingen.
CN1249824A (zh) 包含新的光活性化合物的正性光刻胶
JPH01190665A (ja) スルホン酸エステル及び前記スルホン酸エステルを含むポジテイブ・レジスト
EP0390173A2 (en) Micropattern-forming material and process for forming micropattern
FR2567659A1 (fr) Materiaux de formation d'une image sensibles a un faisceau de haute energie, procede de formation et element obtenu
JPH02105803A (ja) 置換スルホネート基を有する重合体化合物、この重合体化合物を含む感放射線性組成物および重合体化合物の製造方法
KR910007246B1 (ko) 감광성 내식막 조성물
JPS6036503A (ja) 感光性樹脂
US2751373A (en) Light-sensitive polymers for photomechanical processes
JP3093055B2 (ja) 耐熱性ネガ型フォトレジスト組成物および感光性基材、ならびにネガ型パターン形成方法