JPS6036503A - Photosensitive resin - Google Patents

Photosensitive resin

Info

Publication number
JPS6036503A
JPS6036503A JP14588983A JP14588983A JPS6036503A JP S6036503 A JPS6036503 A JP S6036503A JP 14588983 A JP14588983 A JP 14588983A JP 14588983 A JP14588983 A JP 14588983A JP S6036503 A JPS6036503 A JP S6036503A
Authority
JP
Japan
Prior art keywords
polymer
group
formula
reaction
chalcone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14588983A
Other languages
Japanese (ja)
Other versions
JPH0356243B2 (en
Inventor
Shoji Watanabe
渡辺 庄司
Susumu Harashima
進 原島
Noriaki Tsukada
典明 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14588983A priority Critical patent/JPS6036503A/en
Publication of JPS6036503A publication Critical patent/JPS6036503A/en
Publication of JPH0356243B2 publication Critical patent/JPH0356243B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:The titled resin that is obtained by reaction of a specific chalcone derivative with a polymer or copolymer bearing alcoholic hydroxyls, thus giving photosensitive membranes of high toughness, high adhesion, high sensitivity and high chemical stability, having specific groups, by forming the polymer into films on a support. CONSTITUTION:The objective resin having at least one of the group of formula IIis obtained by reaction between a chalcone derivative of formula I (one of R1 and R2 is oxo-methylene bond and the other is single bond; R3 is H, alkyl, cyano, nitro, alkoxy, alkoxycarbonyl, halogen) such as 4-carboxychalcone and a polymer or copolymer bearing alcoholic hydroxyls such as polyvinyl alcohol, preferably in a solvent such as dimethylformamide in the presence of 2,4,6-trinitrotoluene and an organic base such as pyridine. USE:Photoresists, etc.

Description

【発明の詳細な説明】 本発明は感光性樹脂に関するものである。さらに詳しく
いえば本発明は、光架橋性基としてカルコン基またはそ
の誘導体基を持つ感光1/l−4A1脂″に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to photosensitive resins. More specifically, the present invention relates to a photosensitive 1/1-4A1 resin having a chalcone group or a derivative group thereof as a photocrosslinkable group.

これまで、カルコンまたはその誘導体基を有する感光性
樹脂としてはポリベンヤルア士トフェノンにアルデヒド
を反応させることにより得られるものやポリスチレンに
桂皮酸クロライドをフリーデル・クラフト反応させるこ
とにより得られるものなど多数が知られている。これら
の方法では光架橋性基の高い置換率の感光性病JIi7
は得られずこれに帰因して感度が低い。更に従来の合成
法では反応時間を長く必要とし、ケル化を生じるなとの
問題点かある。
Until now, many photosensitive resins having chalcone or its derivative groups have been known, such as those obtained by reacting polybenyarutophenone with aldehyde and those obtained by subjecting polystyrene to a Friedel-Crafts reaction of cinnamic acid chloride. It is being In these methods, photosensitive disease JIi7 with a high substitution rate of photocrosslinkable groups
cannot be obtained, resulting in low sensitivity. Furthermore, conventional synthesis methods require a long reaction time and have the problem of preventing kelization.

本発明者らは、このような従来の感光性樹脂のもつ欠点
を克服すべく鋭意研究を重ねた結果。
The present inventors have conducted intensive research to overcome the drawbacks of conventional photosensitive resins.

一般式(1)で表わされるカルコンまたはその誘導体を
2.4.6−)リニトロクロルベンセンの存在下でアル
コール性水酸基をもつ重合体または共重合体に直接反応
させることに成功し9本発明をなすに至った。すなわち
本発明はアルコール性水酸基をもつ重合体または共重合
体に一般式 (式中のR,、R,、R3は前記と同し意味を示す)で
表わされるカルコン誘導体を反応させてイ81られる一
般式 (式中の1く1. Rz、 Rsは7iij記と同じ意
味を示す)で表わされる基を有する感光性樹脂を提供す
るものである。
The present invention succeeded in directly reacting the chalcone represented by the general formula (1) or a derivative thereof with a polymer or copolymer having an alcoholic hydroxyl group in the presence of 2.4.6-)linitrochlorobenzene. I came to do this. That is, the present invention is produced by reacting a chalcone derivative represented by the general formula (in the formula, R, R, R3 have the same meanings as above) with a polymer or copolymer having an alcoholic hydroxyl group. The present invention provides a photosensitive resin having a group represented by the general formula (in the formula, 1.Rz and Rs have the same meanings as in Section 7iij).

本発明に於て用いられるアルコール性水酸μ。Alcoholic hydroxyl μ used in the present invention.

をもつ重合体または共重合体としではポリビニルアルコ
ール、ホリヒドロキシエチルアクレート、ヒドロキシエ
チルアクリレート−スチレン共重合体、ヒドロキシエチ
ルメタクリレ−1・−メチルメタクリレート共重合体、
ポリ−2−ヒドロキシプロピルメタクリレ−1−、ポリ
エチレンとポリビニルアルコールの共重合体なとを挙げ
ることか出来る。また、一般式(1)で表わされるカル
コン誘導体としては4−カルボキシカルコン、4′−カ
ルボキシカルコン、4′−シアノ−4−カルボキシカル
コン+4’−11プロピル−3−カルボキシカルコン、
4′−クロロ−2−カルボキシカルコン、4′−ニトロ
−4−カルポギシカルコン、3′−メチル−2−カルボ
キシカルコン、4′−メトキシカルコン、3−メ1−キ
ンカルボニルー4−カルボギシカルコンなとを挙げるこ
とが出来る。
Polyvinyl alcohol, polyhydroxyethyl acrylate, hydroxyethyl acrylate-styrene copolymer, hydroxyethyl methacrylate-1-methyl methacrylate copolymer,
Examples include poly-2-hydroxypropyl methacrylate-1-, a copolymer of polyethylene and polyvinyl alcohol, and the like. Further, as the chalcone derivatives represented by the general formula (1), 4-carboxychalcone, 4'-carboxychalcone, 4'-cyano-4-carboxychalcone + 4'-11propyl-3-carboxychalcone,
4'-chloro-2-carboxychalcone, 4'-nitro-4-carboxychalcone, 3'-methyl-2-carboxychalcone, 4'-methoxychalcone, 3-methoxychalcone-4-carboxychalcone, etc. can be mentioned.

また、アルコール性水酸基をもつ重合体または共重合体
と一般式(1)で表わされるカルコン誘導体との反応は
ジメチルボルムアミド、ジメチルスルホキシド、エチル
セロソルブ、エチレングリコールモノメチルエーテルの
ような溶媒中。
Further, the reaction between a polymer or copolymer having an alcoholic hydroxyl group and a chalcone derivative represented by the general formula (1) is carried out in a solvent such as dimethylbormamide, dimethyl sulfoxide, ethyl cellosolve, or ethylene glycol monomethyl ether.

2.4.6−)リニトロトルエンと有機塩基を共存させ
て杓うことかできる。有様塩基としてはピリジン、トリ
エチルアミン、4−ジメチルアミノピリジン、1.4−
ジアザビシクロ〔2゜2.2〕オクタンなどを挙げるこ
とか出来る。反応l、′、1′1度は20℃から100
℃の範囲が望ましいかこれに限定されるものではない。
2.4.6-) It is possible to ladle linitrotoluene and an organic base together. Specific bases include pyridine, triethylamine, 4-dimethylaminopyridine, 1.4-
Examples include diazabicyclo[2°2.2]octane. Reaction l,',1'1 degree is 100 degrees from 20℃
A range of 0.degree. C. is preferred, but is not limited thereto.

この際のカルコ”誘導体ト2. 4. 6 トリニトロ
クロルクロルベンゼン の範囲で選はれる。しかしこれに限定されるものではな
い。また必要に応して使用される有機塩基とカルコン誘
導体のモル比は2:1がら5:1の範囲が望ましいがそ
れ以外であってもよい。反応生成物は反応混合液を水ま
たはアルコールに注加することにより得られる。
In this case, the chalco" derivative is selected from the range of 2.4.6 trinitrochlorochlorobenzene. However, it is not limited to this. Also, if necessary, the organic base used and the mole of the chalcone derivative are selected. The ratio preferably ranges from 2:1 to 5:1, but may be other than that.The reaction product is obtained by pouring the reaction mixture into water or alcohol.

本発明によって提供される感光性樹脂はこの有効ffi
を合板溶剤に溶解して溶液となし,アルミニウム板,銅
板,亜鉛板,銅張り積層板なとの支持体表面」二に,流
延,吹付け,塗布などの手段で施し,乾燥して製膜する
ことができる。
The photosensitive resin provided by the present invention has this effective ffi
is dissolved in a plywood solvent to form a solution, applied to the surface of a support such as an aluminum plate, copper plate, zinc plate, or copper-clad laminate by means such as casting, spraying, or coating, and dried to produce a product. It can be membraned.

このようにして得られる感光性膜は基体とする高分子の
物性を受継ぎ,強靭であり,かつ支持体との密着性がよ
い。このようにしで147ら′4]だ塗膜にネガを通し
て光照射を行い,未露光部を溶剤で除去すると陰画像が
得られる。そして感度か極めて高くまた化学的に安定で
いわゆる暗反応が起こらないために溶液状fルおよび製
膜゛す状態での品質維持が容品である。ぞのためにフA
トレジスト,印刷用PS版,金属エツチングマスクなど
の用途に好適である。
The photosensitive film thus obtained inherits the physical properties of the polymer used as the base, is strong, and has good adhesion to the support. In this way, a negative image is obtained by irradiating light through the negative coating film and removing the unexposed areas with a solvent. Furthermore, since it has extremely high sensitivity and is chemically stable, so-called dark reactions do not occur, quality can be maintained in the solution state and in the film forming state. For the sake of A
It is suitable for applications such as resists, printing PS plates, metal etching masks, etc.

次に本発明を参考例,実施例によりa)細に説明する。Next, the present invention will be explained in detail using reference examples and examples.

参考例1 重合度1 4 0 0,ケン化度85L/FO)のポリ
ビニルアルコール1gをジメヂルアセトアミト“ε30
m1 に溶解しこれに4−カルボキシカルコン7、44
g と2.4.6−トリニトロクロルベンゼン7.30
gを加え、さらにピリジン12gを添加し80℃で4時
間反応させる。次に得られた反応混合物を大過剰の氷に
添加して目的とする感光性’3xJ II!′i′を単
離する。エタノールで洗浄後。
Reference Example 1 1 g of polyvinyl alcohol with a degree of polymerization of 1400 and a degree of saponification of 85 L/FO was mixed with dimethylacetamide ε30
m1 and 4-carboxychalcone 7,44
g and 2.4.6-trinitrochlorobenzene 7.30
Then, 12 g of pyridine was added and the mixture was reacted at 80° C. for 4 hours. Next, the obtained reaction mixture was added to a large excess of ice to obtain the desired photosensitivity '3xJ II! Isolate 'i'. After washing with ethanol.

乾燥した。収h(は2.71gであった。このものの紫
外線吸収スペクトルを調べたところ吸収)へ大は310
nn〕であり、これからカルコン基のえり入率を調べた
ところ60%であった。さらに赤外線吸収スペクトルを
調へたところカルコンプ、しに基づ(吸収力月605 
cm−’ 、及び1665(nl”−1に5忍めらオt
た3、 参考例2 II 合/fJf ]70 Q 、ケル化度85%のポ
リビニルアルコール044gをジメチルアセトアミド4
01η11こ溶角・j′、シこれに4−11ブしJピル
−4−力ルホキシカルコン3.82gと2.4.6−)
リニトロクロルベンゼン3.21g1lえ、サラにピリ
ジン51gを添加し85℃で2特間反応させる。次に得
られた反応混合物を大過剰のエタノールに添加して[j
的とする感光性樹脂を単剖する。エタノールで洗浄後、
乾燥した。収i+、は2.12gであった。このものの
紫外線吸収スペクトルをy、vべたところ吸収極大は3
0G旧11であり、これからカルコン基の導入率を、□
ill’Jべたところ67%であった。さらに赤外線吸
収スペクトルを調べたところカルコン基に2J:づく吸
収が1600 Cm’−’、及び165 (、l cm
−’ に認められた。
Dry. The amount of absorption (was 2.71 g).When I examined the ultraviolet absorption spectrum of this product, the amount of absorption was 310.
nn], and when the incorporation rate of chalcone groups was investigated from this, it was 60%. Furthermore, we investigated the infrared absorption spectrum and found that it was based on Calcomp and Shini (absorption power: 605
cm-', and 1665 (nl"-1 with 5 min.
3. Reference Example 2 II Combined/fJf ] 70
01 η 11 molten angle j', 4-11 times this, J pill 4-force sulfoxychalcone 3.82 g and 2.4.6-)
Add 3.21 g of linitrochlorobenzene to 1 liter of linitrochlorobenzene, add 51 g of pyridine, and react at 85°C for 2 hours. The resulting reaction mixture was then added to a large excess of ethanol to obtain [j
Dissect the target photosensitive resin. After washing with ethanol,
Dry. Yield i+ was 2.12 g. When we plotted the ultraviolet absorption spectrum of this substance in y and v, the absorption maximum was 3
0G old 11, and from now on the introduction rate of chalcone group, □
ill'J overall score was 67%. Further investigation of the infrared absorption spectrum revealed that the absorption caused by the chalcone group was 1600 Cm'-' and 165 (, l cm
−' was recognized.

参考例3 重合度2000.ケン化度85%のポリビニルアルコー
ル0.44gをジメチルアセトアミド40ynl に溶
解しこれに47−クロロ−4−カルボキシカルコン37
2Bと2.4.6−)す二;・[1クロルベンゼン3.
21gを加え、さらにピリジン5.1gを添加し8o“
Cで231.、j間反応させる。次に得られた反応混合
物を大過剰の−1−タノールに添加して【二1的と・す
る感光性+jit l1i−r ’a二単ト111する
。エタノールで洗浄後、彰:*rNyた。収−h:は2
.55gであった。このものの紫外線吸収スペクトルを
調べたところ吸収極太は315 nmてあり、こ第1か
らカルコン基の尋人率を調べたところ76%であった。
Reference example 3 Degree of polymerization: 2000. 0.44 g of polyvinyl alcohol with a degree of saponification of 85% was dissolved in 40 ynl of dimethylacetamide, and 37 g of 47-chloro-4-carboxychalcone was added to the solution.
2B and 2.4.6-) 2;・[1 Chlorobenzene 3.
Add 21g of pyridine, further add 5.1g of pyridine,
231 in C. , j. The resulting reaction mixture was then added to a large excess of -1-tanol to obtain a photosensitive reaction. After washing with ethanol, it was washed with Akira:*rNy. Yi-h: is 2
.. It was 55g. When the ultraviolet absorption spectrum of this product was examined, the maximum absorption was found to be 315 nm, and when the proportion of chalcone groups was examined from the first stage, it was 76%.

さらに赤外線吸収スペクトルを、、L(jべj、−とこ
ろカルコン基に弐(づく吸収が160Qcm−’、及び
1665 C111−’に認められた。
Furthermore, in the infrared absorption spectrum, absorptions at 160Qcm-' and 1665C111-' were observed in the L(jbej,-- and chalcone groups).

参考例4 重合度1,700.ケル化度9〕0%のポリビニルアル
コール0.25gをジメチルアセトアミド2Qml に
溶解しこれに47−メチル−3−カルボキシカルコン1
..97 gと2. 4. 6−ドリニl−oクロルベ
ンセン1.83 g 全加工、 サラニピリジン3.2
gを添加し、85℃で4 n4−間反応させる。次にi
IIら第1たツノ応混合物を大過剰のエタノールを添加
して[1的とする!四光性tbl IIFiを単財する
。エタノールで洗浄後、乾燥した。、収量は0、92 
gであった。このものの紫外線吸収スペクトルを調べた
ところ吸収極大は316 nullであり、こイ1から
カルコン基の尋人率を調べたところ59%であった。さ
らに赤外線吸収スペクトルを調べたところカルコン基に
基づく吸収が1605 cnl−’ 、 及ヒ1660
 cm−’ に計;められた、。
Reference example 4 Degree of polymerization 1,700. Dissolve 0.25 g of polyvinyl alcohol with degree of Kelization 9]0% in 2 Q ml of dimethylacetamide, and add 1 ml of 47-methyl-3-carboxychalcone to this solution.
.. .. 97 g and 2. 4. 6-Dolinylochlorobenzene 1.83 g Fully processed, Salanipyridine 3.2
g and reacted at 85°C for 4 n4-times. then i
II. Add a large excess of ethanol to the first reaction mixture to make it 1! Buy Shikosho TBL IIFi as a single purchase. After washing with ethanol, it was dried. , yield is 0,92
It was g. When the ultraviolet absorption spectrum of this product was examined, the absorption maximum was 316 null, and when the proportion of chalcone groups was examined from Koi 1, it was 59%. Further investigation of the infrared absorption spectrum revealed that the absorption based on chalcone groups was 1605 cnl-' and 1660 cnl-'.
It was measured in cm-'.

参考例5 =Φ重合度 00 、ケン化度85%のポリビニルアル
コール0.25gをジメチルスルホキソ+X2O11]
1 に溶解しこれに3仙ニトロ−3−カルネ・トシカル
コン2.19 gと2.4.6−1−リニト「1クロル
・\ンセン1.83gを加え、さらにピリジン3.4g
を添加し270°Cて25時間反応さ1トる。
Reference Example 5 = 0.25 g of polyvinyl alcohol with a degree of Φ polymerization of 00 and a degree of saponification of 85% was added to dimethyl sulfoxo + X2O11]
1 and added 2.19 g of 3-nitro-3-carne tosychalcone and 1.83 g of 2.4.6-1-linitone, and further 3.4 g of pyridine.
was added and reacted at 270°C for 25 hours.

次にPノらオlた反J、’L袴jIL合物を大過剰の上
タノールに添加しでFI的とする縁8光↑(目ill 
lli’iを単f’il・−4る。、エタノールで洗浄
後、乾燥した。収J、;は1;35gであった。このも
のの紫外線吸収スペクトルを調べたところ吸収極太は3
2 Q nn1であり。
Next, P and others added anti-J, 'L Hakama jIL compound to a large excess of upper ethanol to make it FI-like.
lli'i is simply f'il・-4. , washed with ethanol and dried. The yield was 1; 35 g. When I investigated the ultraviolet absorption spectrum of this substance, the absorption maximum was 3.
2 Q nn1.

これからカルコン基の導入率を調べたとごろ7(1%で
あった。さらに赤外線吸収スペクトルをal:、1べた
ところカルコン基に基づ(吸収かi 600C1rl−
’ 、及び1685011−1こ認められた。
From this, we investigated the introduction rate of chalcone groups and found that it was 7 (1%).Furthermore, we analyzed the infrared absorption spectra of al: and 1. Based on the chalcone groups (absorption or
', and 1685011-1 were recognized.

実施例1 参考例1で得られた1illir 1 gをジメチルア
セトアミt’ l Q ml に溶解し、アルミニウム
板に流延塗布し、乾燥する。これにネガを通して50C
In古11れた距離から500Wキセノンランプからの
光を1秒照射した。未露光部分をジメチルアセトアミド
で除去したところ、鮮明なレリーフ像が得られた。
Example 1 1 g of 1 illir obtained in Reference Example 1 was dissolved in t'lQ ml of dimethylacetamide, and the solution was cast onto an aluminum plate and dried. Pass the negative through this at 50C
Light from a 500W xenon lamp was irradiated for 1 second from a distance of 11 seconds. When the unexposed areas were removed with dimethylacetamide, a clear relief image was obtained.

実施例2 参考例2て衝られた樹脂1gを20m1のジメチルホル
ムアミドに溶解し、これをスピンコーターを用いてアル
ミニウム板に塗布する。得られた塗膜にネガを通して5
 Q Cm離れたところから500Wキセノンランプの
光を1秒照射し未露光部をジメチルホルムアミドで除去
したところ鮮明なレリーフ像が得られた。
Example 2 1 g of the resin prepared in Reference Example 2 was dissolved in 20 ml of dimethylformamide, and this was applied to an aluminum plate using a spin coater. Pass the negative through the obtained coating 5
When light from a 500W xenon lamp was irradiated for 1 second from a distance of Q cm and the unexposed areas were removed with dimethylformamide, a clear relief image was obtained.

実施例3 参考例3で得られた樹脂1gをジメチルホルムアミド2
0m1 に溶解し、アルミニウム板に流延塗布し、乾燥
する。これにネガを通して50CTnpiIれた距離か
ら500Wキセノンランプからの光を1秒間照射した。
Example 3 1 g of the resin obtained in Reference Example 3 was dissolved in dimethylformamide 2
Dissolve in 0ml, cast onto an aluminum plate, and dry. This was irradiated with light from a 500W xenon lamp for 1 second from a distance of 50CTnpiI through the negative.

未露光部分をジメチルアセトアミドで除去したところ、
鮮明なレリーフ像か得られた。
When the unexposed areas were removed with dimethylacetamide,
A clear relief image was obtained.

実施例4 参考例4で得られた樹脂1.5gをメチルエチルケトン
25m1に溶解しシリコンウェハーに流延塗布し、乾燥
する。これにネガを通して50cmj;iiれた距離か
ら500Wキセノンランプからの光を2秒間照則した。
Example 4 1.5 g of the resin obtained in Reference Example 4 was dissolved in 25 ml of methyl ethyl ketone, and the solution was cast onto a silicon wafer and dried. Light from a 500 W xenon lamp was shined through this through a negative for 2 seconds from a distance of 50 cm.

未露光部分をメチルエチルケトンで除去したところ、鮮
明なレリーフ像か待られた。
When the unexposed areas were removed with methyl ethyl ketone, a clear relief image was obtained.

実施例5 参考例5で得られた樹脂1gをジメチルアセトアミド2
0m1に溶解し銅板に流延塗布し。
Example 5 1 g of the resin obtained in Reference Example 5 was mixed with 2 dimethylacetamide.
Dissolve it in 0ml and cast it on a copper plate.

乾燥する。これにネガを通して50 cm pH1iれ
だ距離から500Wキセノンランプからの光を2秒間照
則した。未′露光部分を溶剤で除去したところ、鮮明な
レリーフ像が?4ノられた。
dry. Light from a 500W xenon lamp was illuminated for 2 seconds through this through a negative lens from a 50 cm pH1i beam distance. When the unexposed areas were removed with a solvent, a clear relief image was obtained. I got hit 4 times.

Claims (1)

【特許請求の範囲】 アルコール性水酸基をもつ重合体または共重合体に 一般式 (式中のR+ 、 R2はどちらか−っはオキソメチレ
ン結合であり、他は単なる結合+R3は水素原子、アル
キル基、シアノ呆、ニトロ基、アルコキシ基。 アルコキシカルボニル基、ハロゲン原子であル)で表わ
されるカルコン誘導体を反応させて得られる一般式 (式中のR,、R2,R,は前記と同じ意味を示す)で
表わされる単位を少な(とも1個有する感光性樹脂。
[Claims] A polymer or copolymer having an alcoholic hydroxyl group has the general formula (in the formula, one of R+ and R2 is an oxomethylene bond, the other is a simple bond + R3 is a hydrogen atom or an alkyl group) , cyanobacterium, nitro group, alkoxy group, alkoxycarbonyl group, halogen atom) obtained by the general formula (R, , R2, R in the formula have the same meanings as above). A photosensitive resin having a small number of (all 1) units represented by
JP14588983A 1983-08-10 1983-08-10 Photosensitive resin Granted JPS6036503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14588983A JPS6036503A (en) 1983-08-10 1983-08-10 Photosensitive resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14588983A JPS6036503A (en) 1983-08-10 1983-08-10 Photosensitive resin

Publications (2)

Publication Number Publication Date
JPS6036503A true JPS6036503A (en) 1985-02-25
JPH0356243B2 JPH0356243B2 (en) 1991-08-27

Family

ID=15395390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14588983A Granted JPS6036503A (en) 1983-08-10 1983-08-10 Photosensitive resin

Country Status (1)

Country Link
JP (1) JPS6036503A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2765577A1 (en) * 1997-07-02 1999-01-08 Hoechst Schering Agrevo Sa NEW AROMATIC AMIDES, THEIR PREPARATION PROCESS AND THEIR APPLICATION AS PESTICIDES
KR100481014B1 (en) * 2002-10-04 2005-04-07 주식회사 동진쎄미켐 Photosensitive resin composition using photopolymer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2765577A1 (en) * 1997-07-02 1999-01-08 Hoechst Schering Agrevo Sa NEW AROMATIC AMIDES, THEIR PREPARATION PROCESS AND THEIR APPLICATION AS PESTICIDES
WO1999001422A1 (en) * 1997-07-02 1999-01-14 Hoechst Schering Agrevo S.A. Aromatic amides, their preparation process and their use as pesticides
KR100481014B1 (en) * 2002-10-04 2005-04-07 주식회사 동진쎄미켐 Photosensitive resin composition using photopolymer

Also Published As

Publication number Publication date
JPH0356243B2 (en) 1991-08-27

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