JPS6030732Y2 - Glass substrate holding inspection jig - Google Patents

Description

[Detailed description of the invention] Conventionally, it has been used to hold face plates for image pickup tubes, glass substrates for display elements, etc.
Inspection jigs are made of metal, resin, glass, etc., and are replaced with the necessary jigs in each process.

However, for the above-mentioned parts, dust adhesion on the order of several microns can also cause product defects, and our experiments have confirmed that the dust adhesion potential increases each time the parts are replaced.

Furthermore, it was confirmed that the potential for adhesion to the component is high even when there is dust adhesion to the contact area and surrounding area with the component to be held.

From these experimental results, it is required that the holding parts such as the face plate do not carry static electricity and can be washed and subjected to high temperature treatment when used repeatedly, and that other parts are transparent to enable optical inspection. Ru.

However, conventionally used jigs are made of the same materials such as metal, resin, and glass, and with metal jigs, they are replaced for optical inspection, and with resin jigs, there is dust adhesion due to static electricity generated from the resin jigs themselves, and high temperatures. Glass products that cannot be treated have various drawbacks, such as dust adhesion due to static electricity and cracks when handled because they cannot be treated at high temperatures.

In this invention, the holding part is made of metal to prevent dust collection due to static electricity, and the other parts are made of transparent resin or glass, making it possible to conduct optical inspections with the same jig. By creating a structure in which the plastic or glass parts can be separated, cleaning and high-temperature treatment for repeated use can be carried out independently, making it possible to enhance the dust-proofing effect.

FIG. 1 shows an embodiment of the present invention, and in the same figure, a specific embodiment of a glass substrate etc. 1 is shown.

By making the holding part 2 made of metal, static electricity can be prevented and dust generation from the jig itself can be completely prevented.

Furthermore, cracks on the end face of the face plate can be minimized by reducing the contact with the face plate to the minimum necessary for holding.

Further, by providing the resin part or the glass part 3, it becomes possible to apply illumination light to the face plate from the outside of the side surface through the side surface, and it becomes possible to detect minute defects on the face plate.

In addition, since the metal part 2 and the resin or glass part 3 can be separated, they have an interlocking assembly structure, so they can be independently cleaned and treated at high temperatures for repeated use, and it is possible to prevent dust from adhering to the face plate. It became.

[Brief explanation of the drawing]

The figure is a sectional view of essential parts showing an embodiment of the inspection jig according to the present invention. DESCRIPTION OF SYMBOLS 1...Glass substrate, 2...Metal holding part, 3...Transparent material support structure.

Claims (1)

[Scope of utility model registration request] A glass substrate holding inspection jig for placing a glass substrate and performing optical inspection thereof includes a substrate holding part made of metal that directly holds the peripheral part of the glass substrate, and the substrate holding part is removably mounted. A glass substrate holding/inspection jig comprising a transparent cylindrical part.