JPS6029044B2 - 電気光学測量装置 - Google Patents

電気光学測量装置

Info

Publication number
JPS6029044B2
JPS6029044B2 JP56122555A JP12255581A JPS6029044B2 JP S6029044 B2 JPS6029044 B2 JP S6029044B2 JP 56122555 A JP56122555 A JP 56122555A JP 12255581 A JP12255581 A JP 12255581A JP S6029044 B2 JPS6029044 B2 JP S6029044B2
Authority
JP
Japan
Prior art keywords
grating
pattern
layer
light
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56122555A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5763414A (en
Inventor
ケント・イ−・エリツクソン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUUFUERU ANDO ETSUSAA CO
Original Assignee
KYUUFUERU ANDO ETSUSAA CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUUFUERU ANDO ETSUSAA CO filed Critical KYUUFUERU ANDO ETSUSAA CO
Publication of JPS5763414A publication Critical patent/JPS5763414A/ja
Publication of JPS6029044B2 publication Critical patent/JPS6029044B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/04—Interpretation of pictures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP56122555A 1980-08-11 1981-08-06 電気光学測量装置 Expired JPS6029044B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/176,886 US4286871A (en) 1980-08-11 1980-08-11 Photogrammetric measuring system
US176886 1994-01-03

Publications (2)

Publication Number Publication Date
JPS5763414A JPS5763414A (en) 1982-04-16
JPS6029044B2 true JPS6029044B2 (ja) 1985-07-08

Family

ID=22646279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56122555A Expired JPS6029044B2 (ja) 1980-08-11 1981-08-06 電気光学測量装置

Country Status (8)

Country Link
US (1) US4286871A ( )
JP (1) JPS6029044B2 ( )
CA (1) CA1154585A ( )
CH (1) CH645186A5 ( )
DE (1) DE3131269C2 ( )
FR (1) FR2488395A1 ( )
IT (1) IT1137863B ( )
SE (1) SE456607B ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102617793B1 (ko) * 2022-12-27 2023-12-27 주식회사 휴라이트 수소 발생 장치

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538105A (en) * 1981-12-07 1985-08-27 The Perkin-Elmer Corporation Overlay test wafer
US4475811A (en) * 1983-04-28 1984-10-09 The Perkin-Elmer Corporation Overlay test measurement systems
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS60217361A (ja) * 1984-04-13 1985-10-30 Alps Electric Co Ltd 光反射式コ−ド板
IT1179627B (it) * 1984-05-02 1987-09-16 Olivetti & Co Spa Disco otturatore per trasduttore ottico
JPS6196410A (ja) * 1984-10-17 1986-05-15 Asahi Chem Ind Co Ltd ロ−タリ−エンコ−ダ−用デイスクの製造法
GB8615197D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
JPH11183199A (ja) * 1997-12-25 1999-07-09 Merutekku:Kk フォトセンサー用スケール
DE10011872A1 (de) 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
JP4280509B2 (ja) * 2003-01-31 2009-06-17 キヤノン株式会社 投影露光用マスク、投影露光用マスクの製造方法、投影露光装置および投影露光方法
US7235280B2 (en) * 2003-11-12 2007-06-26 Srs Technologies, Inc. Non-intrusive photogrammetric targets
US7470892B2 (en) * 2004-03-03 2008-12-30 Mitsubishi Denki Kabushiki Kaisha Optical encoder
EP2051047B1 (en) * 2007-06-01 2019-12-25 Mitutoyo Corporation Reflective encoder, scale thereof, and method for manufacturing scale

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116555A (en) * 1958-12-01 1964-01-07 Canadian Patents Dev Photogrammetric plotter
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber
US3839039A (en) * 1969-11-18 1974-10-01 Fuji Photo Optical Co Ltd Process for producing color stripe filter
CA921695A (en) * 1970-01-19 1973-02-27 National Research Council Of Canada Stereocompiler
GB1353470A (en) * 1970-10-19 1974-05-15 Post D Position measuring apparatus utilizing moire fringe multiplication
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3877810A (en) * 1972-11-08 1975-04-15 Rca Corp Method for making a photomask
US3873203A (en) * 1973-03-19 1975-03-25 Motorola Inc Durable high resolution silicon template
CH626169A5 ( ) * 1976-11-25 1981-10-30 Leitz Ernst Gmbh

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102617793B1 (ko) * 2022-12-27 2023-12-27 주식회사 휴라이트 수소 발생 장치

Also Published As

Publication number Publication date
JPS5763414A (en) 1982-04-16
CH645186A5 (fr) 1984-09-14
DE3131269A1 (de) 1982-04-08
DE3131269C2 (de) 1985-08-22
FR2488395A1 (fr) 1982-02-12
FR2488395B1 ( ) 1985-03-29
US4286871A (en) 1981-09-01
SE8104772L (sv) 1982-02-12
SE456607B (sv) 1988-10-17
IT8123461A0 (it) 1981-08-10
CA1154585A (en) 1983-10-04
IT1137863B (it) 1986-09-10

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