FR2488395A1 - Dispositif de mesure electro-optique - Google Patents

Dispositif de mesure electro-optique Download PDF

Info

Publication number
FR2488395A1
FR2488395A1 FR8115458A FR8115458A FR2488395A1 FR 2488395 A1 FR2488395 A1 FR 2488395A1 FR 8115458 A FR8115458 A FR 8115458A FR 8115458 A FR8115458 A FR 8115458A FR 2488395 A1 FR2488395 A1 FR 2488395A1
Authority
FR
France
Prior art keywords
network
light
layer
measuring device
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8115458A
Other languages
English (en)
French (fr)
Other versions
FR2488395B1 (
Inventor
Kent E Erickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keuffel and Esser Co
Original Assignee
Keuffel and Esser Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keuffel and Esser Co filed Critical Keuffel and Esser Co
Publication of FR2488395A1 publication Critical patent/FR2488395A1/fr
Application granted granted Critical
Publication of FR2488395B1 publication Critical patent/FR2488395B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/04—Interpretation of pictures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
FR8115458A 1980-08-11 1981-08-10 Dispositif de mesure electro-optique Granted FR2488395A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/176,886 US4286871A (en) 1980-08-11 1980-08-11 Photogrammetric measuring system

Publications (2)

Publication Number Publication Date
FR2488395A1 true FR2488395A1 (fr) 1982-02-12
FR2488395B1 FR2488395B1 ( ) 1985-03-29

Family

ID=22646279

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8115458A Granted FR2488395A1 (fr) 1980-08-11 1981-08-10 Dispositif de mesure electro-optique

Country Status (8)

Country Link
US (1) US4286871A ( )
JP (1) JPS6029044B2 ( )
CA (1) CA1154585A ( )
CH (1) CH645186A5 ( )
DE (1) DE3131269C2 ( )
FR (1) FR2488395A1 ( )
IT (1) IT1137863B ( )
SE (1) SE456607B ( )

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538105A (en) * 1981-12-07 1985-08-27 The Perkin-Elmer Corporation Overlay test wafer
US4475811A (en) * 1983-04-28 1984-10-09 The Perkin-Elmer Corporation Overlay test measurement systems
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS60217361A (ja) * 1984-04-13 1985-10-30 Alps Electric Co Ltd 光反射式コ−ド板
IT1179627B (it) * 1984-05-02 1987-09-16 Olivetti & Co Spa Disco otturatore per trasduttore ottico
JPS6196410A (ja) * 1984-10-17 1986-05-15 Asahi Chem Ind Co Ltd ロ−タリ−エンコ−ダ−用デイスクの製造法
GB8615197D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
JPH11183199A (ja) * 1997-12-25 1999-07-09 Merutekku:Kk フォトセンサー用スケール
DE10011872A1 (de) * 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
JP4280509B2 (ja) * 2003-01-31 2009-06-17 キヤノン株式会社 投影露光用マスク、投影露光用マスクの製造方法、投影露光装置および投影露光方法
US7235280B2 (en) * 2003-11-12 2007-06-26 Srs Technologies, Inc. Non-intrusive photogrammetric targets
KR100821441B1 (ko) * 2004-03-03 2008-04-11 미쓰비시덴키 가부시키가이샤 광학식 인코더
CN101484780B (zh) * 2007-06-01 2011-07-06 株式会社三丰 反射型编码器、其标尺以及标尺的制造方法
KR102617793B1 (ko) * 2022-12-27 2023-12-27 주식회사 휴라이트 수소 발생 장치

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116555A (en) * 1958-12-01 1964-01-07 Canadian Patents Dev Photogrammetric plotter
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
US3482107A (en) * 1966-07-26 1969-12-02 Leitz Ernst Gmbh Photoelectric position sensing device comprising light diffracting phase gratings using polarizer beam splitters for sensing the time phase position of the gratings
FR2075283A5 ( ) * 1970-01-19 1971-10-08 Canadian Patents Dev
FR2111109A5 ( ) * 1970-10-19 1972-06-02 Post Daniel
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3839039A (en) * 1969-11-18 1974-10-01 Fuji Photo Optical Co Ltd Process for producing color stripe filter
US3873203A (en) * 1973-03-19 1975-03-25 Motorola Inc Durable high resolution silicon template
US3877810A (en) * 1972-11-08 1975-04-15 Rca Corp Method for making a photomask
US4176276A (en) * 1976-11-25 1979-11-27 Ernst Leitz Wetzlar Gmbh Photoelectric incident light distance measuring device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116555A (en) * 1958-12-01 1964-01-07 Canadian Patents Dev Photogrammetric plotter
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
US3482107A (en) * 1966-07-26 1969-12-02 Leitz Ernst Gmbh Photoelectric position sensing device comprising light diffracting phase gratings using polarizer beam splitters for sensing the time phase position of the gratings
US3839039A (en) * 1969-11-18 1974-10-01 Fuji Photo Optical Co Ltd Process for producing color stripe filter
FR2075283A5 ( ) * 1970-01-19 1971-10-08 Canadian Patents Dev
FR2111109A5 ( ) * 1970-10-19 1972-06-02 Post Daniel
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3877810A (en) * 1972-11-08 1975-04-15 Rca Corp Method for making a photomask
US3873203A (en) * 1973-03-19 1975-03-25 Motorola Inc Durable high resolution silicon template
US4176276A (en) * 1976-11-25 1979-11-27 Ernst Leitz Wetzlar Gmbh Photoelectric incident light distance measuring device

Also Published As

Publication number Publication date
CH645186A5 (fr) 1984-09-14
JPS5763414A (en) 1982-04-16
SE8104772L (sv) 1982-02-12
JPS6029044B2 (ja) 1985-07-08
CA1154585A (en) 1983-10-04
IT8123461A0 (it) 1981-08-10
US4286871A (en) 1981-09-01
FR2488395B1 ( ) 1985-03-29
DE3131269A1 (de) 1982-04-08
SE456607B (sv) 1988-10-17
IT1137863B (it) 1986-09-10
DE3131269C2 (de) 1985-08-22

Similar Documents

Publication Publication Date Title
FR2488395A1 (fr) Dispositif de mesure electro-optique
EP0545738B1 (en) Apparatus for measuring the thickness of thin films
EP0577399B1 (en) Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
US5268985A (en) Light-guiding device having a hologram layer
US5555472A (en) Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures
JPH0771925A (ja) 厚いウェハ測定用の装置および方法
FR2484633A1 (fr) Procede et dispositif de mesure de profil de surface sans contact
FR2493541A1 (fr) Procede et equipement pour analyser une deviation de rayonnement
IL107901A (en) Device and method for measuring the thickness of thin membranes
EP0113633A1 (fr) Procédé et dispositif d'alignement optique de motifs dans deux plans rapprochés dans un appareil d'exposition comprenant une source de rayonnement divergent
FR2458830A1 (fr) Systeme de representation optique muni d'un systeme de detection opto-electronique servant a determiner un ecart entre le plan image du systeme de representation et un second plan destine a la representation
FR2682473A1 (fr) Procede et dispositif de relevement optique de la topographie d'objets.
FR2513371A1 (fr) Procede de determination des parametres geometriques de la surface d'un objet et son dispositif de mise en oeuvre
EP0323998A1 (en) An optical angle-measuring device
EP0030878B1 (fr) Système optique d'alignement de deux motifs et photorépéteur mettant en oeuvre un tel système
JP2010048604A (ja) 膜厚測定装置および膜厚測定方法
JP4732569B2 (ja) コーティングの光学的な層厚さを連続的に決定するための方法
CN1447111A (zh) 测量薄膜折射率的方法及装置
FR2542878A1 (fr) Dispositif de balayage
CH626992A5 ( )
JP5472575B2 (ja) 対向面内所定位置における対向面間距離測定装置及び方法、及びそれらを用いた高平面度加工方法
EP0591912B1 (fr) Interféromètre, comprenant un ensemble intégré et un miroir séparés l'un de l'autre par une région de mesure
JPH07113547B2 (ja) 試料面位置測定装置
Leonov et al. Influence of substrate material and geometric features of measurement slits on the measurement results of infrared optical system quality characteristics
RU2044271C1 (ru) Устройство для контроля малых угловых поворотов

Legal Events

Date Code Title Description
ST Notification of lapse