JPS6027964B2 - 方向性ハイカツト空間周波数フイルタ - Google Patents

方向性ハイカツト空間周波数フイルタ

Info

Publication number
JPS6027964B2
JPS6027964B2 JP10864779A JP10864779A JPS6027964B2 JP S6027964 B2 JPS6027964 B2 JP S6027964B2 JP 10864779 A JP10864779 A JP 10864779A JP 10864779 A JP10864779 A JP 10864779A JP S6027964 B2 JPS6027964 B2 JP S6027964B2
Authority
JP
Japan
Prior art keywords
spatial filter
fourier transform
filter
spatial
directional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10864779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5633621A (en
Inventor
慶善 三橋
俊介 武笠
潤一 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Dai Nippon Printing Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP10864779A priority Critical patent/JPS6027964B2/ja
Priority to DE19803031816 priority patent/DE3031816A1/de
Priority to GB8027602A priority patent/GB2058395B/en
Priority to FR8018592A priority patent/FR2464495B1/fr
Publication of JPS5633621A publication Critical patent/JPS5633621A/ja
Publication of JPS6027964B2 publication Critical patent/JPS6027964B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Optical Head (AREA)
JP10864779A 1979-08-28 1979-08-28 方向性ハイカツト空間周波数フイルタ Expired JPS6027964B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10864779A JPS6027964B2 (ja) 1979-08-28 1979-08-28 方向性ハイカツト空間周波数フイルタ
DE19803031816 DE3031816A1 (de) 1979-08-28 1980-08-22 Raeumlicher frequenzfilter
GB8027602A GB2058395B (en) 1979-08-28 1980-08-26 Directional high-cut spatial frequency filter
FR8018592A FR2464495B1 (fr) 1979-08-28 1980-08-27 Filtre spatial directionnel a coupure haute pour appareil d'inspection de defauts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10864779A JPS6027964B2 (ja) 1979-08-28 1979-08-28 方向性ハイカツト空間周波数フイルタ

Publications (2)

Publication Number Publication Date
JPS5633621A JPS5633621A (en) 1981-04-04
JPS6027964B2 true JPS6027964B2 (ja) 1985-07-02

Family

ID=14490098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10864779A Expired JPS6027964B2 (ja) 1979-08-28 1979-08-28 方向性ハイカツト空間周波数フイルタ

Country Status (4)

Country Link
JP (1) JPS6027964B2 (enrdf_load_stackoverflow)
DE (1) DE3031816A1 (enrdf_load_stackoverflow)
FR (1) FR2464495B1 (enrdf_load_stackoverflow)
GB (1) GB2058395B (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
JPS608823A (ja) * 1983-06-29 1985-01-17 Hamamatsu Photonics Kk 空間光変調装置
JPH0827443B2 (ja) * 1986-10-16 1996-03-21 オリンパス光学工業株式会社 シユリ−レン光学装置
JPH0682102B2 (ja) * 1987-02-27 1994-10-19 三菱電機株式会社 パターン欠陥検査装置及びパターン欠陥検査方法
FR2641928B1 (fr) * 1989-01-17 1996-09-13 Thomson Csf Dispositif de projection d'images
JPH0755741Y2 (ja) * 1991-01-25 1995-12-20 富士通テン株式会社 ディスク再生装置のフローティングロック機構

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614232A (en) * 1968-11-25 1971-10-19 Ibm Pattern defect sensing using error free blocking spacial filter
US4000949A (en) * 1969-09-15 1977-01-04 Western Electric Company, Inc. Photomask inspection by optical spatial filtering
US3790280A (en) * 1972-05-03 1974-02-05 Western Electric Co Spatial filtering system utilizing compensating elements
JPS5324301B2 (enrdf_load_stackoverflow) * 1974-09-09 1978-07-20
JPS5276088A (en) * 1975-12-22 1977-06-25 Toshiba Corp System for inspecting defects of pattern having directivity

Also Published As

Publication number Publication date
JPS5633621A (en) 1981-04-04
FR2464495B1 (fr) 1986-05-16
GB2058395B (en) 1983-04-27
DE3031816C2 (enrdf_load_stackoverflow) 1990-06-28
FR2464495A1 (fr) 1981-03-06
DE3031816A1 (de) 1981-03-19
GB2058395A (en) 1981-04-08

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