JPS60263902A - 塩化カリウム用反射防止膜 - Google Patents
塩化カリウム用反射防止膜Info
- Publication number
- JPS60263902A JPS60263902A JP59119919A JP11991984A JPS60263902A JP S60263902 A JPS60263902 A JP S60263902A JP 59119919 A JP59119919 A JP 59119919A JP 11991984 A JP11991984 A JP 11991984A JP S60263902 A JPS60263902 A JP S60263902A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- as2s3
- kci
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 title claims 2
- UKUVVAMSXXBMRX-UHFFFAOYSA-N 2,4,5-trithia-1,3-diarsabicyclo[1.1.1]pentane Chemical compound S1[As]2S[As]1S2 UKUVVAMSXXBMRX-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229940052288 arsenic trisulfide Drugs 0.000 claims abstract description 19
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 18
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 claims abstract description 14
- 229910001632 barium fluoride Inorganic materials 0.000 claims abstract description 11
- 235000011164 potassium chloride Nutrition 0.000 claims abstract description 9
- 239000001103 potassium chloride Substances 0.000 claims abstract description 9
- XASAPYQVQBKMIN-UHFFFAOYSA-K ytterbium(iii) fluoride Chemical compound F[Yb](F)F XASAPYQVQBKMIN-UHFFFAOYSA-K 0.000 claims abstract description 9
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims abstract description 3
- 238000000576 coating method Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910000464 lead oxide Inorganic materials 0.000 claims 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract description 15
- 239000005387 chalcogenide glass Substances 0.000 abstract description 9
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 abstract description 8
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910052958 orpiment Inorganic materials 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 abstract description 2
- 229910004366 ThF4 Inorganic materials 0.000 abstract 1
- 229910009520 YbF3 Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 70
- 239000010410 layer Substances 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000012788 optical film Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- WBFMCDAQUDITAS-UHFFFAOYSA-N arsenic triselenide Chemical compound [Se]=[As][Se][As]=[Se] WBFMCDAQUDITAS-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- CQXADFVORZEARL-UHFFFAOYSA-N Rilmenidine Chemical compound C1CC1C(C1CC1)NC1=NCCO1 CQXADFVORZEARL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003471 anti-radiation Effects 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- HWSZZLVAJGOAAY-UHFFFAOYSA-L lead(II) chloride Chemical compound Cl[Pb]Cl HWSZZLVAJGOAAY-UHFFFAOYSA-L 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59119919A JPS60263902A (ja) | 1984-06-13 | 1984-06-13 | 塩化カリウム用反射防止膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59119919A JPS60263902A (ja) | 1984-06-13 | 1984-06-13 | 塩化カリウム用反射防止膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60263902A true JPS60263902A (ja) | 1985-12-27 |
| JPS6161641B2 JPS6161641B2 (enrdf_load_stackoverflow) | 1986-12-26 |
Family
ID=14773422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59119919A Granted JPS60263902A (ja) | 1984-06-13 | 1984-06-13 | 塩化カリウム用反射防止膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60263902A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6381401A (ja) * | 1986-09-26 | 1988-04-12 | Horiba Ltd | 高出力ｃｏ↓２レ−ザ光用光学部品 |
| JPH01230001A (ja) * | 1988-03-10 | 1989-09-13 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | カルコゲナイドガラスの反射防止膜 |
| JPH03237401A (ja) * | 1990-02-15 | 1991-10-23 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | カルコゲナイドガラスの反射防止膜 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0596926U (ja) * | 1992-05-28 | 1993-12-27 | 三洋電機株式会社 | 駆動力伝達機構 |
-
1984
- 1984-06-13 JP JP59119919A patent/JPS60263902A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6381401A (ja) * | 1986-09-26 | 1988-04-12 | Horiba Ltd | 高出力ｃｏ↓２レ−ザ光用光学部品 |
| JPH01230001A (ja) * | 1988-03-10 | 1989-09-13 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | カルコゲナイドガラスの反射防止膜 |
| JPH03237401A (ja) * | 1990-02-15 | 1991-10-23 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | カルコゲナイドガラスの反射防止膜 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161641B2 (enrdf_load_stackoverflow) | 1986-12-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |