JPS6025234A - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPS6025234A
JPS6025234A JP13403083A JP13403083A JPS6025234A JP S6025234 A JPS6025234 A JP S6025234A JP 13403083 A JP13403083 A JP 13403083A JP 13403083 A JP13403083 A JP 13403083A JP S6025234 A JPS6025234 A JP S6025234A
Authority
JP
Japan
Prior art keywords
wall
plasma
gas
penetrating window
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13403083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352217B2 (enrdf_load_stackoverflow
Inventor
Shuzo Fujimura
藤村　修三
Hiroshi Yano
弘 矢野
Toshimasa Kisa
木佐　俊正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13403083A priority Critical patent/JPS6025234A/ja
Publication of JPS6025234A publication Critical patent/JPS6025234A/ja
Publication of JPH0352217B2 publication Critical patent/JPH0352217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP13403083A 1983-07-21 1983-07-21 マイクロ波プラズマ処理装置 Granted JPS6025234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13403083A JPS6025234A (ja) 1983-07-21 1983-07-21 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13403083A JPS6025234A (ja) 1983-07-21 1983-07-21 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6025234A true JPS6025234A (ja) 1985-02-08
JPH0352217B2 JPH0352217B2 (enrdf_load_stackoverflow) 1991-08-09

Family

ID=15118732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13403083A Granted JPS6025234A (ja) 1983-07-21 1983-07-21 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6025234A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222638A (ja) * 1986-03-20 1987-09-30 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS62264623A (ja) * 1986-05-13 1987-11-17 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS63217628A (ja) * 1987-03-06 1988-09-09 Hitachi Ltd プラズマ処理装置
JPH0475787A (ja) * 1990-07-13 1992-03-10 Sumitomo Metal Ind Ltd 形鋼または鋼管溶接の入熱制御方法
JP2013186970A (ja) * 2012-03-06 2013-09-19 Ulvac Japan Ltd プラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202532A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd マイクロ波プラズマ放電管

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202532A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd マイクロ波プラズマ放電管

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222638A (ja) * 1986-03-20 1987-09-30 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS62264623A (ja) * 1986-05-13 1987-11-17 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS63217628A (ja) * 1987-03-06 1988-09-09 Hitachi Ltd プラズマ処理装置
JPH0475787A (ja) * 1990-07-13 1992-03-10 Sumitomo Metal Ind Ltd 形鋼または鋼管溶接の入熱制御方法
JP2013186970A (ja) * 2012-03-06 2013-09-19 Ulvac Japan Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPH0352217B2 (enrdf_load_stackoverflow) 1991-08-09

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